Abstract: A laser patterning alignment method provides a way to position a target at a working distance in a laser patterning system such that fiducial marks on the target are positioned in view of at least three laser patterning system cameras, and with each laser patterning system camera, to locate a fiducial mark on the target and sending location data of the located fiducial mark to a controller, to determine corrections required to align expected fiducial mark locations with the sent fiducial mark location data, and to adjust the laser patterning system with the determined corrections.

Abstract: A laser patterning alignment method provides a way to position a target at a working distance in a laser patterning system such that fiducial marks on the target are positioned in view of at least three laser patterning system cameras, and with each laser patterning system camera, to locate a fiducial mark on the target and sending location data of the located fiducial mark to a controller, to determine corrections required to align expected fiducial mark locations with the sent fiducial mark location data, and to adjust the laser patterning system with the determined corrections.

Abstract: A method includes determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern, determining a set of scan optic actuation rates based on the set of initial scan optic actuation corrections, and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors.

Abstract: A laser patterning alignment method provides a way to position a target at a working distance in a laser patterning system such that fiducial marks on the target are positioned in view of at least three laser patterning system cameras, and with each laser patterning system camera, to locate a fiducial mark on the target and sending location data of the located fiducial mark to a controller, to determine corrections required to align expected fiducial mark locations with the sent fiducial mark location data, and to adjust the laser patterning system with the determined corrections.

Abstract: A laser patterning alignment method provides a way to position a target at a working distance in a laser patterning system such that fiducial marks on the target are positioned in view of at least three laser patterning system cameras, and with each laser patterning system camera, to locate a fiducial mark on the target and sending location data of the located fiducial mark to a controller, to determine corrections required to align expected fiducial mark locations with the sent fiducial mark location data, and to adjust the laser patterning system with the determined corrections.

Abstract: A method includes determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern, determining a set of scan optic actuation rates based on the set of initial scan optic actuation corrections, and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors.

Abstract: A method includes determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern, determining a set of scan optic actuation rates based on the set of initial scan optic actuation corrections, and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors.

Abstract: A monitoring system for a multi-laser module includes detectors corresponding to each laser and situated to receive a portion of the associated laser beam uncombined with other beams. Laser characteristics are measured and stored, and in operation are used to identify device failures. A comparator receives a reference value and compares the reference value with a current operational value. If the current value is less that the reference value, a possible failure is indicated. Signal cross-coupling among the detectors is also used to identify undesirable scattering that can be associated with surface contamination or device failure.

Abstract: A method includes determining a set of pattern position errors between (i) a set of expected pattern positions of a calibration pattern on a laser target situated in a laser processing field of a laser system and produced based on a set of initial scan optic actuation corrections associated with a scan optic of the laser system and (ii) a set of measured pattern positions of the calibration pattern, determining a set of scan optic actuation rates based on the set of initial scan optic actuation corrections, and updating the set of initial scan optic actuation corrections based on the set of scan optic actuation rates and the set of pattern position errors so as to form a set of updated scan optic actuation corrections that is associated with a reduction of at least a portion of the set of pattern position errors.

Abstract: A monitoring system for a multi-laser module includes detectors corresponding to each laser and situated to receive a portion of the associated laser beam uncombined with other beams. Laser characteristics are measured and stored, and in operation are used to identify device failures. A comparator receives a reference value and compares the reference value with a current operational value. If the current value is less that the reference value, a possible failure is indicated. Signal cross-coupling among the detectors is also used to identify undesirable scattering that can be associated with surface contamination or device failure.

Abstract: A laser patterning alignment method provides a way to position a target at a working distance in a laser patterning system such that fiducial marks on the target are positioned in view of at least three laser patterning system cameras, and with each laser patterning system camera, to locate a fiducial mark on the target and sending location data of the located fiducial mark to a controller, to determine corrections required to align expected fiducial mark locations with the sent fiducial mark location data, and to adjust the laser patterning system with the determined corrections.