Patents by Inventor Vivek Vohra

Vivek Vohra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for processing substrates with sonic energy that reduces or eliminates damage to semiconductor devices
    Publication number: 20060260638
    Abstract: A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.
    Type: Application
    Filed: March 8, 2006
    Publication date: November 23, 2006
    Inventors: Pejman Fani, Ismail Kashkoush, John Korbler, Vivek Vohra, Alan Walter
  • Method and system for processing substrates with sonic energy that reduces or eliminates damage to semiconductor devices
    Publication number: 20060260639
    Abstract: A system and method for processing and/or cleaning substrates using sonic energy that eliminates or reduces damage to the substrates. In one aspect, the invention utilizes and produces low power density sonic energy to effectively remove particles from a substrate. In another aspect, the invention utilizes and generates a clean electrical signal for driving a source of sonic energy, such as a transducer.
    Type: Application
    Filed: March 8, 2006
    Publication date: November 23, 2006
    Inventors: Pejman Fani, Ismail Kashkoush, John Korbler, Vivek Vohra, Alan Walter