Abstract: The present invention relates to an electron detector for use in a scanning electron microscope. The detector is used to detect high and low energy backscattered electrons as well as secondary electrons. The detector is based on the use of a high transparency conductive film over the surface of the detector, whereby the surface is stable to the application of a high voltage. The detector is be used to detect both high and low energy backscattered secondary electrons and has an active surface with an adjacent fine metal mesh grid which is used to transmit electrons without loss of energy, while at the same time providing a conductive surface over the surface of the detector material.

Abstract: An analysis system for a scanning electron microscope having a backscattered electron detector. The output of the detector is amplified, processed by an analogue to digital converter, multi-channel analyser, and digital conversion and processing circuit to generate a signal indicative of the atomic number factor of the specimen. Calculation of stoichiometric valence combinations of non-elemental specimens is also disclosed. A calibration device is also disclosed.

Abstract: An electron microscope backscattered detector comprising an arm of scintillation material with a hole through which the electron beam passes, the hole being provided with a removable grounded liner to facilitate cleaning and prevent astigmatism problems due to electron build up.