Abstract: An apparatus having a plurality of arrayed MEMS devices, each device having a parallel-plate actuator and a reflective plate, both of which are mechanically coupled to a flexible beam attached between two anchors. Advantageously, the use of parallel-plate actuators in the apparatus alleviates stringent requirements for the alignment of lithographic masks employed in the fabrication process. In one embodiment, each flexible beam has a relatively small thickness and a relatively large length to effect a relatively large displacement range for the corresponding reflective plate. Movable electrodes of different parallel-plate actuators are configured to act as an electrical shield for the flexible beams, which reduces inter-device crosstalk in the apparatus. Reflective plates of different MEMS devices form a segmented mirror, which is suitable for adaptive-optics and/or maskless lithography applications.

Abstract: Multiple drives are coupled together to cause rotation about a single axis by an arrangement in which two moveable electrode plates flank a fixed electrode plate such that the opposite direction rotations of the two moveable electrode plates are combined. To this end, at least one arm from at least one of the moveable electrode plates is connected to at least one arm of a moveable electrode plate on the opposite side of the fixed electrode plate, e.g., by a spring. The electrode plates may have comb projections. A post may be coupled at one of its ends to the top of one of the moveable electrode plates, and the post's other end is coupled to a plate, e.g., a mirror or other structure to be moved.

Abstract: A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.

Abstract: An apparatus having a plurality of arrayed MEMS devices, each device having a parallel-plate actuator and a reflective plate, both of which are mechanically coupled to a flexible beam attached between two anchors. Advantageously, the use of parallel-plate actuators in the apparatus alleviates stringent requirements for the alignment of lithographic masks employed in the fabrication process. In one embodiment, each flexible beam has a relatively small thickness and a relatively large length to effect a relatively large displacement range for the corresponding reflective plate. Movable electrodes of different parallel-plate actuators are configured to act as an electrical shield for the flexible beams, which reduces inter-device crosstalk in the apparatus. Reflective plates of different MEMS devices form a segmented mirror, which is suitable for adaptive-optics and/or maskless lithography applications.

Abstract: A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about ?2 mm?1 to about +2 mm?1.

Abstract: A waveguide/MEMS switch adapted to redirect optical signals between output ports based on a phase shift change generated by motion of one or more movable MEMS mirrors incorporated therein. Advantageously, such a switch has a relatively high switching speed and low power consumption. A switch according to one embodiment of the invention includes a planar waveguide device and a planar MEMS device. The MEMS device implements in-plane (i.e., parallel to the plane of that device) translation of the mirrors. As a result, in certain embodiments of the switch, the waveguide and MEMS devices are connected into a compact planar assembly.

Abstract: A freely rotatable micromechanical plate is achieved by employing at least three rotatable plates that are each suspended from a substrate via respective springs, and are coupled via other respective springs to at least three moveable plate attachment points, so that rotation of the rotatable plates about an axis transfers motion to the moveable plate attachment points. Respective posts couple the movement of each respective moveable plate attachment point to a moveable plate. In operation, the rotatable plates may be individually rotated, and the resulting motion of each rotatable plate is passed to its respective moveable plate attachment point. The combined motion of the moveable plate attachment points is passed to the moveable plate via the posts. Using proper control, the plate may be made to tip, tilt and piston. Advantageously, the piston motion may achieve a high vertical movement frequency response.

Abstract: A method and apparatus are disclosed for adjusting the phase of an optical signal by varying the path length of the optical signal using one or more moveable mirrors. The phase adjustment techniques of the present invention may be employed in various optical devices, including 1×n optical switches. The position of the mirrors may be controlled, for example, using micromachined control elements that physically move the mirror along the lightpath. An exemplary 2-by-2 optical switch includes two waveguides configured to include a coupler region. A mirror is positioned at the output of each waveguide. The position of at least one of the mirrors may be adjusted along the optical path and the mirrors reflect the light exiting from the end of the waveguides back into the same waveguide after an adjustable phase delay due to the round trip through an adjustable air gap between the waveguides and corresponding mirrors.

Abstract: A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.

Abstract: The invention addresses a micro-electro-mechanical (MEMS) device, or an array of such devices, for use in an optical communication system and a method of manufacture therefore. An embodiment of the device includes a moveable element support structure, a moveable element and torsional members that couple the moveable element support structure and the moveable element and allow the moveable element to gimbal with respect to the support structure. The inventive device includes torsional members that are substantially free of corrosion thereby producing a device with improved response characteristics. The method includes using an etchant that substantially inhibits corrosion of the torsional members.

Abstract: A waveguide/MEMS switch adapted to redirect optical signals between output ports based on a phase shift change generated by motion of one or more movable MEMS mirrors incorporated therein. Advantageously, such a switch has a relatively high switching speed and low power consumption. A switch according to one embodiment of the invention includes a planar waveguide device and a planar MEMS device. The MEMS device implements in-plane (i.e., parallel to the plane of that device) translation of the mirrors. As a result, in certain embodiments of the switch, the waveguide and MEMS devices are connected into a compact planar assembly.

Abstract: A MEMS device having a movable mirror and a movable actuator plate mechanically coupled together such that a relatively small displacement of the plate results in mirror rotation by a relatively large angle. In a representative embodiment, the mirror and actuator plate are supported on a substrate. The actuator plate moves in response to a voltage difference applied between the plate and an electrode located on the substrate beneath that plate. One or more springs attached to the plate provide a counteracting restoring force when they are stretched from their rest positions by the plate motion. A spring attached between the actuator plate and the mirror transfers the motion of the actuator plate to the mirror such that, when the actuator plate moves toward the substrate, the mirror moves away from the substrate.

Abstract: The invention addresses a micro-electro-mechanical (MEMS) device, or an array of such devices, for use in an optical communication system and a method of manufacture therefore. An embodiment of the device includes a moveable element support structure, a moveable element and torsional members that couple the moveable element support structure and the moveable element and allow the moveable element to gimbal with respect to the support structure. The inventive device includes torsional members that are substantially free of corrosion thereby producing a device with improved response characteristics. The method includes using an etchant that substantially inhibits corrosion of the torsional members.

Abstract: The present invention provides a micro-electro-mechanical system (MEMS) optical device. The micro-electro-mechanical system (MEMS) optical device includes a mirror having a substrate with an implanted light reflective optical layer thereover, and a mounting substrate on which the mirror is movably mounted. The inclusion of the dopant within the light reflective optical layer increases the tensile stress of the device and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.

Abstract: A WDM add/drop device for use in an optic communications system for adding and dropping optical wavelengths from a multiple-wavelength optical system. The device includes a set of lenses, a planar grating wavelength multiplexer and a micromirror array switchable for individual wavelengths of the multiple-wavelength signal between a transmit mode and a reflect mode. The grating angularly demultiplexes a multiple-wavelength optical signal in a first direction and the individual wavelengths are processed by the micromirror array and directed to the grating in a second direction. The micromirror array will either reflect select wavelengths to a first port or transmit select wavelengths to a second port. In a preferred embodiment, ports on a first multiport circulator input the multiple-wavelength optical signal to the WDM add/drop device and output the multiple-wavelength optical signal from the WDM add/drop device.

Abstract: An article for directing optical signals among optical waveguides is disclosed. The article comprises a plurality of mirror elements that are mechanically and electrically interconnected to form a reflective surface. The reflective surface is deformable upon application of a voltage. Optical signals delivered from a source waveguide may be directed to different destination waveguides as the reflective surface is deformed. The plurality of mirror elements is actuated by a single actuator.

Abstract: An optical attenuator for use in optical power regulation uses a shutter to control the insertion loss of a gap in a pair of substantially coaxially aligned waveguides, for example a pair of optical fibers. The shutter is part of a MEMS accuator device and is coupled to the movable one of a pair of spaced plates, the movable plate being movable by a voltage applied between the pair of plates. To regulate the power, a small portion of the optical power is abstracted and used to derive a control voltage that is applied to the optical attenuator for varying the attenuation inserted in the optical wave path.

Abstract: Arrayed waveguide grating routers are used to form 1.times.N demultiplexers and N.times.1 multiplexers to form channel drop modules in a WDM optical network. The demultiplexer and the multiplexer are interconnected by optical waveguides in which are inserted optical switches provided by MEMs devices that can be used to reflect incident optical signals backwards for dropping channels or to both transmit and reflect incident optical signals to drop and detect channels.

Abstract: One-by-three and two-by-two optical switches comprising optical waveguides or fibers with tapered ends that utilize electrostatically-driven actuators are disclosed. Tapering of the fiber ends allow the ends to be positioned in close proximity to one another to yield an optical switch with low insertion loss.

Abstract: An article comprising a light-actuated photonic switch is disclosed. The light-actuated photonic switch advantageously includes a photogenerator that powers a micro-electromechanical systems (MEMS) switch having very low voltage requirements. The MEMS switch is operable to move a reflector into or out of a path of an optical signal travelling between two waveguides. Since the MEMS switch has such low voltage requirements, a long wave photogenerator, which generates relatively low voltages, can be used. As long wavelength light experiences relatively little attenuation in optical fiber, active lightwave circuits incorporating the present light-actuated photonic switch can have very long fiber runs to remote nodes.