Abstract: Method of optical measuring the microrelief of an object using a modulation interference microscope. An input coherent monochromatic polarized light flux is split into an object light beam exposing the object and a reference beam. The light flux intensity is redistributed between the object and reference beams. Thereafter, polarization modulation is performed separately for the object beam and the reference beam. The polarized object beam is reflected onto the object plane to expose the object field. Amplitude modulation is performed by changing the intensity ratio between the object beam and the reference beam. A fraction of the light at a pixel caused by the object beam with respect to the total light falling on the pixel is determined.

Abstract: The invention relates to optical engineering, in particular to methods for measuring a microrelief, the distribution of optical material constants of a near-surface layer and can be used for microelectronic engineering, nanotechnology, material science, medicine and biology. The aim of the invention is to improve spatial resolution for mearsuring geometrical parameters of the relief and the distribution of the optical material constants, extend the range of defined constants including optical anisotropy constants, significantly increasing the accuracy of definition of the material constant and extending the number of objects studied. The inventive method for measuring microrelief and optical characteristics of the near-surface layer and a modulation interference microscope for carrying out said method are also disclosed.

Abstract: An accelerator for heavy ions includes four uniformly spaced, perpendicular electrodes with a height H, a length L, and a thickness t and wherein each electrode including at least two rectangular windows therein. Each window has a height b and a width W. The windows in each electrode are separated by a distance a and windows of adjacent electrodes are offset by a distance (W+a)/2 from each other. The accelerator is capable of resonating at relatively low frequencies and with relatively small diameters due to the enhanced coupling between chambers in the resonant cavity.