Abstract: A variable optical attenuator, or VOA, for attenuating an optical signal between two photonic components by changing an alignment of a light beam with an output photonic component in at least two dimensions. A first configuration of the invented VOA has an actuator and two optical fibers. The actuator moves one optical fiber to form a light beam trajectory on the remaining optical fiber, wherein the shape of the trajectory has at least two separate dimensional components. A second configuration of the invented VOA includes a mirror that the actuator moves within at least two degrees of freedom and thereby forms a two-dimensional trajectory of the reflected light beam on a photonic component. A third embodiment includes a mirror, a mirror actuator and a dual fiber collimator having a lens and two optical fibers. The VOA may be partially or wholly integrated on a substrate and/or incorporated as a MEMS-based device.

Abstract: A variable optical attenuator, or VOA, includes a movable focusing mirror and an actuator integrated on a substrate or within a MEMS. The actuator moves the mirror within a range of motion to reflect, focus and steer a light beam. One embodiment further includes an input and an output photonic component, such as wave guides or optical fibers. The wave guides or optical fibers may have angled endfaces and be positioned to reduce the required operating range of motion of the mirror. The mirror may be a Fresnel mirror, a concave mirror, a diffractive mirror or a concave diffractive mirror. In certain embodiments the mirror is moved in at least two dimensions to steer the light beam to form a trajectory having at least two dimensions.

Abstract: An optical switch includes a plurality of transmitting devices with a plurality of optical fibers that each have a distal end. A plurality of focusing devices are included. Each distal end of a fiber is coupled to at least one focusing device. A plurality of receiving devices are provided. At least a portion of the distal ends of the optical fibers move in three orthogonal and at least two angular dimensions to direct output beams from the plurality of transmitting devices to the plurality of receiving devices.

Abstract: A variable optical attenuator, or VOA, includes a movable focusing mirror and an actuator integrated on a substrate or within a MEMS. The actuator moves the mirror within a range of motion to reflect, focus and steer a light beam. One embodiment further includes an input and an output photonic component, such as wave guides or optical fibers. The wave guides or optical fibers may have angled endfaces and be positioned to reduce the required operating range of motion of the mirror. The mirror may be a Fresnel mirror, a concave mirror, a diffractive mirror or a concave diffractive mirror. In certain embodiments the mirror is moved in at least two dimensions to steer the light beam to form a trajectory having at least two dimensions.

Abstract: A variable optical attenuator, or VOA, for attenuating an optical signal between two photonic components by changing an alignment of a light beam with an output photonic component in at least two dimensions. A first configuration of the invented VOA has an actuator and two optical fibers. The actuator moves one optical fiber to form a light beam trajectory on the remaining optical fiber, wherein the shape of the trajectory has at least two separate dimensional components. A second configuration of the invented VOA includes a mirror that the actuator moves within at least two degrees of freedom and thereby forms a two-dimensional trajectory of the reflected light beam on a photonic component. A third embodiment includes a mirror, a mirror actuator and a dual fiber collimator having a lens and two optical fibers. The VOA may be partially or wholly integrated on a substrate and/or incorporated as a MEMS-based device.

Abstract: An optical switch includes a plurality of transmitting devices with a plurality of optical fibers that each have a distal end. A plurality of focusing devices are included. Each distal end of a fiber is coupled to at least one focusing device. A plurality of receiving devices are provided. At least a portion of the distal ends of the optical fibers move in three orthogonal and at least two angular dimensions to direct output beams from the plurality of transmitting devices to the plurality of receiving devices.

Abstract: An optical switch includes a plurality of transmitting devices with a plurality of optical fibers. A plurality of receiving devices are provided that include a plurality of optical fibers. At least a portion of the transmitting devices simultaneously focus and direct transmitter output beams from the plurality of transmitting devices to the plurality of receiving devices.

Abstract: An optical switch includes a plurality of transmitting devices. Each individual transmitting device includes at least a distal portion of an optical fiber, a focusing device and a directing device that are mechanically and optically coupled. A plurality of receiving devices are provided. At least a portion of the transmitting devices focus and direct output beams along single vector paths from the plurality of transmitting devices to the plurality of receiving devices, and a at least a portion of the single vector paths crossing each other.

Abstract: Wafer-to-wafer bonding using, e.g., solder metal bonding, glass bonding or polymer (adhesive) bonding is improved by profiling one or both of the wafer surfaces being bonded to define microstructures therein. Profiling means providing other than the conventional planar bonding surface to define cavities therein. The bonding material fills the cavities in the microstructures. For instance, a system of ridges and trenches (e.g. in cross-section vertical, slanted, key-holed shaped, or diamond-shaped) are microstructures that increase the surface area of the wafers to which the bonding material can adhere. Use of the key-hole shaped or diamond-shaped profile having a negative slope at the trench interior substantially increases the bonding force.