Patents by Inventor Vladimir Mihailovitch Krivtsum

Vladimir Mihailovitch Krivtsum has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
    Patent number: 7208746
    Abstract: A device for generating radiation source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode of cathode or on a separate material located in between the anode and cathode.
    Type: Grant
    Filed: July 14, 2004
    Date of Patent: April 24, 2007
    Assignee: ASML Netherlands B.V.
    Inventors: Konstantin Nikolaevitch Koshelev, Vladimir Vitalevitch Ivanov, Evgenii Dmitreevitch Korob, Givi Georgievitch Zukavishvili, Robert Rafilevitch Gayazov, Vladimir Mihailovitch Krivtsum