Patents by Inventor Vladimir Mikolinsky

Vladimir Mikolinsky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • On-the-fly automatic defect classification for substrates using signal attributes
    Patent number: 6256093
    Abstract: A system for on-the-fly automatic defect classification (ADC) in a scanned wafer. The system includes a light source illuminating the scanned wafer so as to generate an illuminating spot incident on the wafer. Sensor collecting light scattered from the spot by the at least two spaced apart detectors, and processor analyzing the collected light so as to detect defects in the wafer and classifying the defects into distinct defect types.
    Type: Grant
    Filed: June 25, 1998
    Date of Patent: July 3, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Erez Ravid, Ido Holcman, Vladimir Mikolinsky