Patents by Inventor Vladimir Tumakov

Vladimir Tumakov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Clustering sub-care areas based on noise characteristics
    Patent number: 11615993
    Abstract: A care area is determined in an image of a semiconductor wafer. The care area is divided into sub-care areas based on the shapes of polygons in a design file associated with the care area. A noise scan of a histogram for the sub-care areas is then performed. The sub-care areas are clustered into groups based on the noise scan of the histogram.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: March 28, 2023
    Assignee: KLA CORPORATION
    Inventors: Boshi Huang, Hucheng Lee, Vladimir Tumakov, Sangbong Park, Bjorn Brauer, Erfan Soltanmohammadi
  • System and method for inspection using tensor decomposition and singular value decomposition
    Patent number: 11431976
    Abstract: A sample characterization system is disclosed. In embodiments, the sample characterization system includes a controller communicatively coupled to an inspection sub-system, the controller including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to: acquire one or more target image frames of a sample; generate a target tensor with the one or more acquired target image frames; perform a first set of one or more decomposition processes on the target tensor to generate one or more reference tensors including one or more reference image frames; identify one or more differences between the one or more target image frames and the one or more reference image frames; and determine one or more characteristics of the sample based on the one or more identified differences.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: August 30, 2022
    Assignee: KLA Corporation
    Inventors: Nurmohammed Patwary, Richard Wallingford, James A. Smith, Xiaochun Li, Vladimir Tumakov, Bjorn Brauer
  • Clustering Sub-Care Areas Based on Noise Characteristics
    Publication number: 20210159127
    Abstract: A care area is determined in an image of a semiconductor wafer. The care area is divided into sub-care areas based on the shapes of polygons in a design file associated with the care area. A noise scan of a histogram for the sub-care areas is then performed. The sub-care areas are clustered into groups based on the noise scan of the histogram.
    Type: Application
    Filed: November 9, 2020
    Publication date: May 27, 2021
    Inventors: Boshi Huang, Hucheng Lee, Vladimir Tumakov, Sangbong Park, Bjorn Brauer, Erfan Soltanmohammadi
  • System and Method for Inspection Using Tensor Decomposition and Singular Value Decomposition
    Publication number: 20200244963
    Abstract: A sample characterization system is disclosed. In embodiments, the sample characterization system includes a controller communicatively coupled to an inspection sub-system, the controller including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to: acquire one or more target image frames of a sample; generate a target tensor with the one or more acquired target image frames; perform a first set of one or more decomposition processes on the target tensor to form generate one or more reference tensors including one or more reference image frames; identify one or more differences between the one or more target image frames and the one or more reference image frames; and determine one or more characteristics of the sample based on the one or more identified differences.
    Type: Application
    Filed: January 16, 2020
    Publication date: July 30, 2020
    Inventors: Nurmohammed Patwary, Richard Wallingford, James A. Smith, Xiaochun Li, Vladimir Tumakov, Bjorn Brauer
  • Imaging based on cosmic-ray produced charged particles
    Patent number: 8536527
    Abstract: Techniques, apparatus and systems for obtaining tomographic images of a volume of interest by using charged particle tomography detection systems.
    Type: Grant
    Filed: August 27, 2009
    Date of Patent: September 17, 2013
    Assignees: Decision Sciences International Corporation, Los Alamos National Security, LLC
    Inventors: Christopher L. Morris, Larry Joe Schultz, Jesse Andrew Green, Michael James Sossong, Konstantin N. Borozdin, Alexei V. Klimenko, Gary Blanpied, Vladimir Tumakov, Kolo Wamba
  • IMAGING BASED ON COSMIC-RAY PRODUCED CHARGED PARTICLES
    Publication number: 20110248163
    Abstract: Techniques, apparatus and systems for obtaining tomographic images of a volume of interest by using charged particle tomography detection systems.
    Type: Application
    Filed: August 27, 2009
    Publication date: October 13, 2011
    Applicants: LOS ALAMOS NATIONAL SECURITY, LLC, DECISION SCIENCES INTERNATIONAL CORPORATION
    Inventors: Christoper L. Morris, Larry Joe Schultz, Jesse Andrew Green, Michael James Sossong, Konstantin N. Borozdin, Alexei V. Klimenko, Gary Blanpied, Vladimir Tumakov, Kolo Wamba