Patents by Inventor Vladimir V. Fleurov

Vladimir V. Fleurov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automatic gas control system for a gas discharge laser
    Patent number: 6963595
    Abstract: An automatic F2 laser gas control, for a modular high repetition rate ultraviolet gas discharge laser. The laser gas control includes techniques, monitors, and processor for monitoring the F2 consumption rates through the operating life of the laser system. These consumption rates are used by a processor programmed with an algorithm to determine F2 injections needed to maintain laser beam quality within a delivery range. Preferred embodiments include F2 controls for a two-chamber MOPA laser system.
    Type: Grant
    Filed: January 31, 2003
    Date of Patent: November 8, 2005
    Assignee: Cymer, Inc.
    Inventors: John A. Rule, Richard C. Morton, Vladimir V. Fleurov, Fedor Trintchouk, Toshihiko Ishihara, Alexander I. Ershov, James A. Carmichael