Abstract: A system and method for inputting motion measurement data into a computationally based device are provided. In a first version three-axis accelerometer determines components of an inertial force vector with respect to an orthogonal coordinate system. The accelerometer includes a sensor die made of a semiconductor substrate having a frame element, a proof mass element, and an elastic element mechanically coupling the frame and the proof mass. The accelerometer also has three or more stress-sensitive IC components integrated into the elastic element adjacent to the frame element for electrical connectivity without metal conductor traversal of the elastic element.

Abstract: A method for fabricating semiconductor microstructures with a combination of etching steps, i.e. local RIE, isotropic, etc. followed by deep anisotropic etching.

Abstract: A rolling micromirror is disclosed which comprises a micromirror guided in movement by a reference surface. The micromirror is suspended adjacent to the reference surface by a suspension element. An actuator moves the micromirror in relationship with a control signal. The suspension element provides a restoring force that returns the micromirror to an initial position when the actuator applies less than a minimal force to the micromirror. The micromirror optionally includes a stationary or movable pivot point about which the micromirror rotates and tilts. The preferred embodiment is integrated on a single substrate and is a micro-electro-mechanical device.

Abstract: A method and apparatus for a VOA with improved wavelength-dependent optical losses is provided. The primary elements of this improved VOA are a package, a movable structure with a reflecting surface, and a collimator. The collimator is comprised of various optical components including a ferrule holding at least two waveguides and a lens. Selecting a ferrule and a lens such that the plane containing the end of the ferrule and the ends of the waveguides is not parallel to the facing end of the lens, it is possible to determine positions and axial orientations of the ferrule with respect to the lens which result in minimal wavelength-dependent optical losses. By geometrically configuring the optical components of the collimator in this way, and subsequently positioning and axially orienting the collimator and movable structure to minimize wavelength-dependent losses, a VOA with minimal wavelength-dependent optical losses can be constructed.

Abstract: An apparatus and method to align and assemble a photonic package with sub-micron placement accuracy. The apparatus, or feature, maintains mechanical contact between a first and a second photonic component while the two photonics are aligned and affixed together. The package may comprise the first photonic component having a contact surface and the second photonic component having a partially spherical surface. The contact surface is shaped and fitted to rotatably couple with the partially spherical surface while permitting the partially spherical surface to move in at least three rotational degrees of freedom. The two photonic components are then aligned as desired and affixed together. Certain variations permit motion of the partially spherical surface in three rotational degrees of freedom and one linear degree of freedom. At least one version of the invention includes aligning and assembling an optical fiber with an optical MEMS-based device.

Abstract: A rolling micromirror is disclosed which comprises a micromirror guided in movement by a reference surface. The micromirror is suspended adjacent to the reference surface by a suspension element. An actuator moves the micromirror in relationship with a control signal. The suspension element provides a restoring force that returns the micromirror to an initial position when the actuator applies less than a minimal force to the micromirror. The micromirror optionally includes a stationary or movable pivot point about which the micromirror rotates and tilts. The preferred embodiment is integrated on a single substrate and is a micro-electro-mechanical device.

Abstract: A variable optical attenuator, or VOA, and method of operation is provided. The operational method increases the linearity of the optical signal attenuation versus an applied actuator actuation signal and decreases the attenuation loss sensitivity to actuation signal noise and actuation signal uncertainty. A preferred embodiment has a light emitting waveguide and optionally an output waveguide, a focusing system, a mirror having a reflecting surface, and a mirror actuator. The mirror is operatively connected with a suspension element that returns the mirror to a highest attenuation, or zero actuation, position when the actuator fails to supply a minimal force to the mirror. The preferred embodiment provides better optical attenuation accuracy and enables reductions in both the complexity and cost of control circuitry of the VOA.

Abstract: A photonic device package, the assembly and manufacturing methods thereof are provided. The package may be mounted to a substrate such as a PC board in a novel and inventive technique that allows several orientations, whereby a system designer has an increased flexibility in designing a module or system that includes a photonic device. The photonic device package is designed to be fabricated, handled, manufactured and tested by methods that take advantage of semiconductor industry standards.

Abstract: An optical switch includes a plurality of transmitting devices integrated on a single substrate. Each individual transmitting device includes a directing device. A plurality of receiving devices are provided. At least a portion of the transmitting devices direct output beams from the plurality of transmitting devices to the plurality of receiving devices.