Patents by Inventor Vladimir Vital'evich Ivanov

Vladimir Vital'evich Ivanov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reducing fast ions in a plasma radiation source
    Patent number: 7518135
    Abstract: A radiation source with an anode and a cathode to create a discharge in a discharge space between the anode and the cathode is disclosed. A plasma is formed in the radiation source which generates electromagnetic radiation, such as EUV radiation. The radiation source includes a first activation source to direct a first energy pulse onto a first spot in the radiation source near the discharge space to create a main plasma channel which triggers the discharge. The radiation source also has a second activation source to direct a second energy pulse onto a second spot in the radiation source near the discharge space to create an additional plasma channel. By directing the second energy pulse during the same discharge, a shortcutting of the main plasma current is realized which in turn may reduce the amount of fast ions produced.
    Type: Grant
    Filed: December 20, 2006
    Date of Patent: April 14, 2009
    Assignee: ASML Netherlands B.V.
    Inventors: Vladimir Vital'evich Ivanov, Vadim Yevgenyevich Banine, Konstantin Nikolaevich Koshelev