Patents by Inventor Vladislav Davidkovich
Vladislav Davidkovich has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11480457Abstract: Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.Type: GrantFiled: December 23, 2019Date of Patent: October 25, 2022Assignee: MKS Instruments, Inc.Inventors: David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict, Gordon Hill
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Publication number: 20200124457Abstract: Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.Type: ApplicationFiled: December 23, 2019Publication date: April 23, 2020Applicant: MKS Instruments, Inc.Inventors: David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict, Gordon Hill
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Patent number: 10557736Abstract: Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.Type: GrantFiled: April 28, 2017Date of Patent: February 11, 2020Assignee: MKS Instruments, Inc.Inventors: David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict, Gordon Hill
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Publication number: 20170328756Abstract: Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.Type: ApplicationFiled: April 28, 2017Publication date: November 16, 2017Applicant: MKS Instruments, Inc.Inventors: David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict, Gordon Hill
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Publication number: 20130025786Abstract: An improved gas delivery system and method delivers a sequence of pulses of prescribed amounts of at least two gases to a process chamber of a process tool in accordance with a predetermined recipe of steps of a gas delivery process. The system comprises: a plurality of channels, each including a control valve connected so as to control each pulse of gas flowing through the corresponding channel into the process chamber of the process tool; and an exhaust valve for controlling the pressure within the process chamber, the exhaust valve including a valve controller for controlling the operation of the gas delivery system including the control valves and the exhaust valve in accordance with the predetermined recipe of steps.Type: ApplicationFiled: July 28, 2011Publication date: January 31, 2013Inventors: Vladislav Davidkovich, Martin Ryan, David Chamberlain, Philip W. Sullivan, Paul D. Lucas, John Thomas Hillhouse, Robert Krmpotich
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Patent number: 7950294Abstract: A valve system includes a valve and a controller that controls the valve. The valve includes a valve body, and a motor configured to deliver a torque to the valve body to cause the valve body to move between an open position and a closed position. The controller is configured to drive the motor by applying a current to the motor. The controller is configured to measure the torque delivered by the motor to the valve body, compare the calculated torque with a threshold value, and diagnose a need by the valve system for preventive maintenance when the calculated torque is substantially equal to the threshold value. The threshold value represents substantially the maximum amount of torque available from the stepper motor.Type: GrantFiled: June 20, 2008Date of Patent: May 31, 2011Assignee: MKS Instruments, Inc.Inventors: Vladislav Davidkovich, Gordon Hill
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Patent number: 7643909Abstract: A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.Type: GrantFiled: March 30, 2006Date of Patent: January 5, 2010Assignee: MKS Instruments, Inc.Inventors: David J. Goldman, Martin Ryan, Vladislav Davidkovich, Gordon Hill
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Publication number: 20090314074Abstract: A valve system includes a valve and a controller that controls the valve. The valve includes a valve body, and a motor configured to deliver a torque to the valve body to cause the valve body to move between an open position and a closed position. The controller is configured to drive the motor by applying a current to the motor. The controller is configured to measure the torque delivered by the motor to the valve body, compare the calculated torque with a threshold value, and diagnose a need by the valve system for preventive maintenance when the calculated torque is substantially equal to the threshold value. The threshold value represents substantially the maximum amount of torque available from the stepper motor.Type: ApplicationFiled: June 20, 2008Publication date: December 24, 2009Inventors: Vladislav Davidkovich, Gordon Hill
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Patent number: 7369920Abstract: A pressure control system for controlling pressure of a fluid in a chamber includes a pressure sensor configured to measure the pressure of the fluid in the chamber, and a valve configured to control the pressure of the fluid in the chamber by regulating flow of the fluid from the chamber. The pressure control system further includes a controller. The controller is configured to estimate the volume of the chamber, and to generate a pump speed curve of the valve. The controller is further configured to monitor and modify the pump speed curve so as to maintain a slope of the pump speed curve to at least a minimum value, and to use the modified pump speed curve to adjust the position of the valve in response to pressure measurements by the pressure sensor, so as to maintain the pressure in the chamber at a desired pressure setpoint.Type: GrantFiled: March 21, 2006Date of Patent: May 6, 2008Assignee: MKS Instruments, Inc.Inventors: Vladislav Davidkovich, Gordon Hill, Dave Chamberlain, Paul Lucas
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Publication number: 20070235668Abstract: A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.Type: ApplicationFiled: March 30, 2006Publication date: October 11, 2007Applicant: MKS Instruments, Inc.Inventors: David Goldman, Martin Ryan, Vladislav Davidkovich, Gordon Hill
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Publication number: 20070225870Abstract: A pressure control system for controlling pressure of a fluid in a chamber includes a pressure sensor configured to measure the pressure of the fluid in the chamber, and a valve configured to control the pressure of the fluid in the chamber by regulating flow of the fluid from the chamber. The pressure control system further includes a controller. The controller is configured to estimate the volume of the chamber, and to generate a pump speed curve of the valve. The controller is further configured to monitor and modify the pump speed curve so as to maintain a slope of the pump speed curve to at least a minimum value, and to use the modified pump speed curve to adjust the position of the valve in response to pressure measurements by the pressure sensor, so as to maintain the pressure in the chamber at a desired pressure setpoint.Type: ApplicationFiled: March 21, 2006Publication date: September 27, 2007Inventors: Vladislav Davidkovich, Gordon Hill, Dave Chamberlain, Paul Lucas
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Patent number: 6614132Abstract: An electrical energy storage system for supplying power to a load comprises a plurality of flywheel energy storage systems, each supplying a power output signal, and a connector circuit. The connector circuit connects the flywheel energy storage systems to the load, but the flywheel energy storage systems are not connected to each other. Each of the flywheel energy storage systems comprises a flywheel turning at an initially predetermined rate, a motor/generator coupled to the flywheel, a bi-directional inverter circuit coupled to the motor/generator and to the load, and a control circuit coupled to the motor/generator and the bi-directional inverter circuit. The control circuit controls the power output signal of the flywheel energy storage system independently of the other flywheel energy storage systems.Type: GrantFiled: November 30, 2001Date of Patent: September 2, 2003Assignee: Beacon Power CorporationInventors: Richard L. Hockney, Geoff B. Lansberry, Vladislav Davidkovich, William T. Larkins, Emil Muchnik
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Publication number: 20030102718Abstract: An electrical energy storage system for supplying power to a load comprises a plurality of flywheel energy storage systems, each supplying a power output signal, and a connector circuit. The connector circuit connects the flywheel energy storage systems to the load, but the flywheel energy storage systems are not connected to each other. Each of the flywheel energy storage systems comprises a flywheel turning at an initially predetermined rate, a motor/generator coupled to the flywheel, a bi-directional inverter circuit coupled to the motor/generator and to the load, and a control circuit coupled to the motor/generator and the bi-directional inverter circuit. The control circuit controls the power output signal of the flywheel energy storage system independently of the other flywheel energy storage systems.Type: ApplicationFiled: November 30, 2001Publication date: June 5, 2003Inventors: Richard L. Hockney, Geoff B. Lansberry, Vladislav Davidkovich, William T. Larkins, Emil Muchnik