Patents by Inventor Vlasta Kaufman

Vlasta Kaufman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical polishing systems and methods for their use
    Publication number: 20050148187
    Abstract: Alpha-amino acid containing chemical mechanical polishing compositions and slurries that are useful for polishing substrates including multiple layers of metals, or metals and dielectrics.
    Type: Application
    Filed: January 10, 2005
    Publication date: July 7, 2005
    Inventors: Shumin Wang, Vlasta Kaufman