Patents by Inventor Vojtech Pacak

Vojtech Pacak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma generating apparatus having an electrostatic shield
    Patent number: 5903106
    Abstract: A plasma generating source for processing semiconductor integrated circuits is provided. The plasma generating source is configured to control the amount of electromagnetic energy and the distribution of the electric and magnet energies coupled to the plasma. The plasma generating source comprises a plasma containing region and a source of electromagnetic energy for generating a plasma. An electrostatic shield is disposed between the source of electromagnetic energy and the plasma containing region. The electrostatic shield has a plurality of openings therethrough configured to control the amount and distribution of electromagnetic energy coupled from the source into the plasma containing region. The openings may be configured in a variety of ways to control the magnitude and distribution of electromagnetic energy coupled to the plasma.
    Type: Grant
    Filed: November 17, 1997
    Date of Patent: May 11, 1999
    Assignee: WJ Semiconductor Equipment Group, Inc.
    Inventors: Lydia J. Young, Vojtech Pacak