Patents by Inventor Volker Gajewski

Volker Gajewski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for the treatment of objects, preferably wafers
    Patent number: 6293291
    Abstract: A method for the treatment of objects, preferably wafers, in a corresponding apparatus. The apparatus having at least two or more process chambers for receiving and treating the objects as well as a handling apparatus, for example a robot arm, for loading and unloading the process chambers. To date, all the process chambers have been loaded with the objects directly in succession. Accordingly, the actual treatment begins virtually simultaneously in all the process chambers. Furthermore, the necessary cleaning processes in the process chambers are also carried out virtually simultaneously.
    Type: Grant
    Filed: April 9, 1999
    Date of Patent: September 25, 2001
    Assignee: Siemens Aktiengesellschaft
    Inventors: Hans-Peter Sperlich, Volker Gajewski