Abstract: A nanorobot module with a measurement device for the measurement of spatial surface properties with a measurement range in the centimetre range and a resolution in the nanometre range, that can be arranged in a vacuum chamber, for example the vacuum chamber of a microscope. Along with this integration of the nanorobot module into a vacuum chamber, the disclosure further relates to the automation of the module in the chamber system, in particular the connection of the controller of the nanorobot system and the chamber system by the provision of an interface between both systems. Finally, the disclosure relates to a mechatronic exchange adapter for the flexible securing of nanorobot modules within a vacuum chamber, in particular the disclosure relates to an exchange adapter, which preferably in one process electrically connects a nanorobot module and mechanically secures it so that it is guided with high precision and without play.

Abstract: A positioning unit (1) includes an accelerating nanodrive (2), which has a resolution of at least ±10 nm, a slider (5) and a module (6, 7), which has a stationary component (6) and a component (7) movable for this purpose. The component (7) has a mass of less than 500 g and is movably supported relative to the drive (2). The slider (5) and the movable component (7) of the module (6, 7) are securely connected one to the other and the drive (2) can exert accelerations higher than 10 G.

Abstract: A positioning unit (1) includes an accelerating nanodrive (2), which has a resolution of at least ±10 nm, a slider (5) and a module (6, 7), which has a stationary component (6) and a component (7) movable for this purpose. The component (7) has a mass of less than 500 g and is movably supported relative to the drive (2). The slider (5) and the movable component (7) of the module (6, 7) are securely connected one to the other and the drive (2) can exert accelerations higher than 10 G.