Abstract: A method for measurement of the thickness of thin layers or determination of an element concentration of a measurement object. A primary beam is directed from an X-ray radiation source onto the measurement object. A secondary radiation emitted by the measurement object is detected by a detector and is relayed to an evaluation device. The primary beam is moved within a grid surface which is divided into grid partial surfaces as well as subdivided into at least one line and at least one column. For each grid partial surface a primary beam is directed onto the grid surface. A measuring spot of the primary beam fills at least the grid point. A lateral dimension of the measurement surface is detected and compared to the size of the measuring spot of the primary beam appearing on the measurement object, for size determination of the measurement surface of the measurement object.

Abstract: The invention relates to a method for the measurement of a measurement object (24) by means of X-ray fluorescence, in particular for the measurement of the thickness of thin layers or determination of an element concentration of a measurement object (24), in which a primary beam (22) is directed from an X-ray radiation source (21) onto the measurement object (24), for which a secondary radiation (26) emitted by the measurement object (24) is detected by a detector (27) and is relayed to an evaluation device (29) in which the primary beam (22) is moved within a grid surface (31) which is divided into grid partial surfaces (1 . . . n) as well as subdivided into at least one line (Z1 . . . Zn) and at least one column (S1 . . . Sn), and for each grid partial surface (1 . . .

Abstract: An apparatus for measurement of the thickness of thin layers by means of X-rays using an X-ray tube which emits X-rays which are directed at a layer to be measured, has at least one aperture apparatus arranged between the X-ray tube and the layer to be measured. The apparatus includes an area absorbing X-rays and an aperture opening. At least one aperture opening in the aperture apparatus has a geometric shape which, seen in the beam direction, projects an area which at least in places is matched to the geometry of the layer to be measured.

Abstract: Apparatus for guiding X-rays from a radiation source to a measurement object (16) having at least two reflecting areas (18) forming a slit.

Abstract: The invention relates to a method of setting a position of an object of measurement in layer thickness measurement by X-ray fluorescence in which a beam of an optical recording device is projected into the beam of the X-radiation and in which the surface of the object of measurement is recorded and output as an image comprising a number of image points, with the distance between the surface and the collimator being changed by an absolute amount of a path of movement, with changes in brightness of the image points being recorded in at least one measuring plane during the at least one change of the distance between the surface and the collimator, with the maximum of the difference in brightness of the image points of an image being ascertained after the at least one change of the absolute amount of the distance, and with the distance between the collimator and the object of measurement being set to the position of the ascertained maximum of the difference in brightness.

Abstract: A specimen part for determining the intensity data of a measuring spot in X-ray fluorescent analysis is characterized in that it has a probe with a clearly defined contour surrounded by a surrounding material, the surrounding material and the probe material having the same linear attenuation coefficients for the emitted X-ray fluorescent radiation. With a method according to the invention it is possible to determine both the intensity centre and the contour of the measuring spot.