Patents by Inventor Vriddhachalam K. Viswanathan

Vriddhachalam K. Viswanathan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reflective optical imaging system for extreme ultraviolet wavelengths
    Patent number: 5212588
    Abstract: A projection reflection optical system has two mirrors in a coaxial, four reflection configuration to reproduce the image of an object. The mirrors have spherical reflection surfaces to provide a very high resolution of object feature wavelengths less than 200 .mu.m, and preferably less than 100 .mu.m. An image resolution of features less than 0.05-0.1 .mu.m, is obtained over a large area field; i.e., 25.4 mm .times.25.4 mm, with a distortion less than 0.1 of the resolution over the image field.
    Type: Grant
    Filed: April 9, 1991
    Date of Patent: May 18, 1993
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Vriddhachalam K. Viswanathan, Brian E. Newnam