Patents by Inventor Vulf Perlov

Vulf Perlov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Advanced Bi-directional linear polishing system and method
    Patent number: 6908368
    Abstract: The present invention describes a chemical mechanical polishing apparatus and method that uses a portion of a polishing pad that is disposed under tension between a supply spool and a receive spool, with a motor providing the tension to either the supply spool or the receive spool and the other spool being locked during processing. If a new section of the polishing pad is needed, the same motor that provided the tension is used to advance the polishing pad a determined amount. Further, during processing, a feedback mechanism is used to ensure that the tension of the polishing pad is consistently maintained.
    Type: Grant
    Filed: July 7, 2003
    Date of Patent: June 21, 2005
    Assignee: ASM Nutool, Inc.
    Inventors: Douglas W. Young, Vulf Perlov, Efrain Velazquez
  • Advanced bi-directional linear polishing system and method
    Publication number: 20040097177
    Abstract: The present invention describes a chemical mechanical polishing apparatus and method that uses a portion of a polishing pad that is disposed under tension between a supply spool and a receive spool, with a motor providing the tension to either the supply spool or the receive spool and the other spool being locked during processing. If a new section of the polishing pad is needed, the same motor that provided the tension is used to advance the polishing pad a determined amount. Further, during processing, a feedback mechanism is used to ensure that the tension of the polishing pad is consistently maintained.
    Type: Application
    Filed: July 7, 2003
    Publication date: May 20, 2004
    Inventors: Douglas W. Young, Vulf Perlov, Efrain Velazquez
  • Pad tensioning method and system in a bi-directional linear polisher
    Patent number: 6589105
    Abstract: The present invention describes a chemical mechanical polishing apparatus and method that uses a portion of a polishing pad that is disposed under tension between a supply spool and a receive spool, with a motor providing the tension to either the supply spool or the receive spool and the other spool being locked during processing. If a new section of the polishing pad is needed, the same motor that provided the tension is used to advance the polishing pad a determined amount. Further, during processing, a feedback mechanism is used to ensure that the tension of the polishing pad is consistently maintained.
    Type: Grant
    Filed: April 18, 2002
    Date of Patent: July 8, 2003
    Assignee: Nutool, Inc.
    Inventors: Douglas W. Young, Vulf Perlov, Efrain Velazquez
  • Pad tensioning method and system in a bi-directional linear polisher
    Publication number: 20030022599
    Abstract: The present invention describes a chemical mechanical polishing apparatus and method that uses a portion of a polishing pad that is disposed under tension between a supply spool and a receive spool, with a motor providing the tension to either the supply spool or the receive spool and the other spool being locked during processing. If a new section of the polishing pad is needed, the same motor that provided the tension is used to advance the polishing pad a determined amount. Further, during processing, a feedback mechanism is used to ensure that the tension of the polishing pad is consistently maintained.
    Type: Application
    Filed: April 18, 2002
    Publication date: January 30, 2003
    Inventors: Douglas W. Young, Vulf Perlov, Efrain Velazquez