Patents by Inventor Vyril A. Monk

Vyril A. Monk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Diamond membranes for X-ray lithography
    Patent number: 5146481
    Abstract: A substantially compressive stress-free, pin-holes free, and defects free continuous polycrystalline diamond membrane for an x-ray lithography mask is produced by placing a prepared substrate into a hot filament chemical vapor deposition reaction chamber, pre-heating the substrate to 400.degree. C.-650.degree. C. in the presence of an inert gas, heating the substrate to 650.degree. C.-700.degree. C. in the presence of hydrogen and carbon compounds, and chemically vapor depositing a polycrystalline diamond membrane onto the substrate.
    Type: Grant
    Filed: June 25, 1991
    Date of Patent: September 8, 1992
    Inventors: Diwakar Garg, Vyril A. Monk, Carl F. Mueller