Patents by Inventor W. Karl Olander
W. Karl Olander has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10229840Abstract: An ion implantation system is described, including: an ion implanter comprising a housing defining an enclosed volume in which is positioned a gas box configured to hold one or more gas supply vessels, the gas box being in restricted gas flow communication with gas in the enclosed volume that is outside the gas box; a first ventilation assembly configured to flow ventilation gas through the housing and to exhaust the ventilation gas from the housing to an ambient environment of the ion implanter; a second ventilation assembly configured to exhaust gas from the gas box to a treatment apparatus that is adapted to at least partially remove contaminants from the gas box exhaust gas, or that is adapted to dilute the gas box exhaust gas, to produce a treated effluent gas, the second ventilation assembly comprising a variable flow control device for modulating flow rate of the gas box exhaust gas between a relatively lower gas box exhaust gas flow rate and a relatively higher gas box exhaust gas flow rate, and a motType: GrantFiled: October 29, 2015Date of Patent: March 12, 2019Assignee: Entegris, Inc.Inventors: W. Karl Olander, Ying Tang, Barry Lewis Chambers, Steven E. Bishop
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Patent number: 9991095Abstract: Cleaning of an ion implantation system or components thereof, utilizing temperature and/or a reactive cleaning reagent enabling growth/etching of the cathode in an indirectly heated cathode for an ion implantation system by monitoring the cathode bias power and taking corrective action depending upon compared values to etch or regrow the cathode.Type: GrantFiled: August 12, 2009Date of Patent: June 5, 2018Assignee: Entegris, Inc.Inventors: Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, Robert Kaim, David Eldridge, Lin Feng, Steven E. Bishop, W. Karl Olander, Ying Tang
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Publication number: 20160305682Abstract: A ventilation gas management system and process for an enclosure adapted to contain fluid supply vessel(s) and through which ventilation gas is flowed to provide safe operation in the event of leakage of fluid from a vessel. Ventilation gas flow is modulated to accommodate various hazard levels associated with the deployment and operation of such enclosure containing fluid supply vessel(s), e.g., a gas box or gas cabinet in a semiconductor manufacturing facility, thereby achieving reduction in ventilation gas requirements otherwise required for such deployment and operation.Type: ApplicationFiled: July 5, 2016Publication date: October 20, 2016Inventors: W. Karl Olander, Paul J. Marganski
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Patent number: 9455147Abstract: Methods of implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. A method of manufacturing a semiconductor device including implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. Also disclosed are a system for supplying a boron hydride precursor, and methods of forming a boron hydride precursor and methods for supplying a boron hydride precursor. In one implementation of the invention, the boron hydride precursors are generated for cluster boron implantation, for manufacturing semiconductor products such as integrated circuitry.Type: GrantFiled: December 26, 2012Date of Patent: September 27, 2016Assignee: ENTEGRIS, INC.Inventors: W. Karl Olander, Jose I. Arno, Robert Kaim
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Patent number: 9383064Abstract: A ventilation gas management system and process for an enclosure adapted to contain fluid supply vessel(s) and through which ventilation gas is flowed to provide safe operation in the event of leakage of fluid from a vessel. Ventilation gas flow is modulated to accommodate various hazard levels associated with the deployment and operation of such enclosure containing fluid supply vessel(s), e.g., a gas box or gas cabinet in a semiconductor manufacturing facility, thereby achieving reduction in ventilation gas requirements otherwise required for such deployment and operation.Type: GrantFiled: January 11, 2011Date of Patent: July 5, 2016Assignee: ENTEGRIS, INC.Inventors: W. Karl Olander, Paul J. Marganski
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Patent number: 8603252Abstract: A method and apparatus for cleaning residue from components of semiconductor processing systems used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive material for sufficient time and under sufficient conditions to at least partially remove the residue. When the residue and the material from which the components are constructed are different, the gas-phase reactive material is selectively reactive with the residue and minimally reactive with the materials from which the components of the ion implanter are constructed. When the residue and the material from which the components are constructed is the same, then the gas-phase reactive material may be reactive with both the residue and the component part.Type: GrantFiled: April 26, 2007Date of Patent: December 10, 2013Assignee: Advanced Technology Materials, Inc.Inventors: Frank Dimeo, James Dietz, W. Karl Olander, Robert Kaim, Steven Bishop, Jeffrey W. Neuner, Jose Arno, Paul J. Marganski, Joseph D. Sweeney, David Eldridge, Sharad Yedave, Oleg Byl, Gregory T. Stauf
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Publication number: 20130251913Abstract: Dopant source gas supply arrangements and methods are described, wherein one or more dopant source gas supply vessels is contained inside an outer enclosure of an ion implantation system, e.g., in a gas box within such enclosure. In one implementation, a dopant source gas supply vessel is positioned in remote relationship to the gas box of the ion implantation system, with a dopant source gas local vessel in the gas box, and a supply line interconnecting the dopant source gas supply vessel in supply relationship to the dopant source gas local vessel, in which the supply line is adapted to flow dopant source gas from the supply vessel to the local vessel only when the ion implantation system is in a non-operational state, and to be evacuated or filled with an inert pressurized gas when the ion implantation system is in an operational state.Type: ApplicationFiled: November 26, 2011Publication date: September 26, 2013Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: W. Karl Olander, Robert Kaim, Joseph D. Sweeney, Joseph R. Despres
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Patent number: 8389068Abstract: Methods of implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. A method of manufacturing a semiconductor device including implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. Also disclosed are a system for supplying a boron hydride precursor, and methods of forming a boron hydride precursor and methods for supplying a boron hydride precursor. In one implementation of the invention, the boron hydride precursors are generated for cluster boron implantation, for manufacturing semiconductor products such as integrated circuitry.Type: GrantFiled: October 27, 2010Date of Patent: March 5, 2013Assignee: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, Jose I. Arno, Robert Kaim
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Publication number: 20120315837Abstract: A ventilation gas management system and process for an enclosure adapted to contain fluid supply vessel(s) and through which ventilation gas is flowed to provide safe operation in the event of leakage of fluid from a vessel. Ventilation gas flow is modulated to accommodate various hazard levels associated with the deployment and operation of such enclosure containing fluid supply vessel(s), e.g., a gas box or gas cabinet in a semiconductor manufacturing facility, thereby achieving reduction in ventilation gas requirements otherwise required for such deployment and operation.Type: ApplicationFiled: January 11, 2011Publication date: December 13, 2012Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: W. Karl Olander, Paul J. Marganski
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Patent number: 8282023Abstract: Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.Type: GrantFiled: May 31, 2011Date of Patent: October 9, 2012Assignee: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, James V. McManus, Steven J. Hultquist, Jose I. Arno, Peter C. Van Buskirk
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Publication number: 20120058252Abstract: Cleaning of an ion implantation system or components thereof, utilizing temperature and/or a reactive cleaning reagent enabling growth/etching of the cathode in an indirectly heated cathode for an ion implantation system by monitoring the cathode bias power and taking corrective action depending upon compared values to etch or regrow the cathode.Type: ApplicationFiled: August 12, 2009Publication date: March 8, 2012Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, Robert Kaim, David Eldridge, Lin Feng, Steven E. Bishop, W. Karl Olander, Ying Tang
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Publication number: 20110259366Abstract: Cleaning of an ion implantation system or components thereof, utilizing a reactive cleaning reagent enabling growth/etching of the filament in an ion source of the arc chamber, by appropriate control of temperature in the arc chamber to effect the desired filament growth or alternative filament etching. Also described is the use of reactive gases such as XeFx, WFx, AsFx, PFx and TaFx, wherein x has a stoichioimetrically appropriate value or range of values, for cleaning regions of ion implanters, or components of implanters, in in situ or ex situ cleaning arrangements, under ambient temperature, elevated temperature or plasma conditions. Among specific reactive cleaning agents, BrF3 is described as useful for cleaning ion implant systems or component(s) thereof, in in situ or ex situ cleaning arrangements.Type: ApplicationFiled: February 11, 2009Publication date: October 27, 2011Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: Joseph D. Sweeney, Sharad N. Yedave, Oleg Byl, Robert Kaim, David Eldridge, Steven Sergi, Lin Feng, Steven E. Bishop, W. Karl Olander, Ying Tang
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Publication number: 20110226874Abstract: Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.Type: ApplicationFiled: May 31, 2011Publication date: September 22, 2011Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: W. Karl Olander, James V. McManus, Steven J. Hultquist, Jose I. Arno, Peter C. Van Buskirk
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Patent number: 7951225Abstract: Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.Type: GrantFiled: May 3, 2006Date of Patent: May 31, 2011Assignee: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, James V. McManus, Steven J. Hultquist, Jose I. Arno, Peter C. Van Buskirk
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Patent number: 7943204Abstract: Methods of implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. A method of manufacturing a semiconductor device including implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. Also disclosed are a system for supplying a boron hydride precursor, and methods of forming a boron hydride precursor and methods for supplying a boron hydride precursor. In one implementation of the invention, the boron hydride precursors are generated for cluster boron implantation, for manufacturing semiconductor products such as integrated circuitry.Type: GrantFiled: August 30, 2006Date of Patent: May 17, 2011Assignee: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, Jose I. Arno, Robert Kaim
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Publication number: 20110065268Abstract: Methods of implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. A method of manufacturing a semiconductor device including implanting boron-containing ions using fluorinated boron-containing dopant species that are more readily cleaved than boron trifluoride. Also disclosed are a system for supplying a boron hydride precursor, and methods of forming a boron hydride precursor and methods for supplying a boron hydride precursor. In one implementation of the invention, the boron hydride precursors are generated for cluster boron implantation, for manufacturing semiconductor products such as integrated circuitry.Type: ApplicationFiled: October 27, 2010Publication date: March 17, 2011Applicant: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, Jose I. Arno, Robert Kaim
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Patent number: 7857880Abstract: A semiconductor manufacturing process facility requiring use therein of air exhaust for its operation, such facility including clean room and gray room components, with the clean room having at least one semiconductor manufacturing tool therein, and wherein air exhaust is flowed through a region of the clean room. The facility includes an air exhaust treatment apparatus arranged to (i) receive air exhaust after flow thereof through said region of said clean room, (ii) produce a treated air exhaust, and (iii) recirculate the treated air exhaust to an ambient air environment in the facility, e.g., to the gray room of the facility.Type: GrantFiled: February 3, 2009Date of Patent: December 28, 2010Assignee: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, Joseph D. Sweeney, Luping Wang
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Patent number: 7819981Abstract: A method and apparatus for cleaning residue from components of an ion source region of an ion implanter used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive halide composition for sufficient time and under sufficient conditions to at least partially remove the residue. The gas-phase reactive halide composition is chosen to react selectively with the residue, while not reacting with the components of the ion source region or the vacuum chamber.Type: GrantFiled: October 26, 2004Date of Patent: October 26, 2010Assignee: Advanced Technology Materials, Inc.Inventors: Frank DiMeo, Jr., James Dietz, W. Karl Olander, Robert Kaim, Steven E. Bishop, Jeffrey W. Neuner, Jose I. Arno
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Patent number: 7798168Abstract: Apparatus and method for dispensing a gas using a gas source coupled in selective flow relationship with a gas manifold. The gas manifold includes flow circuitry for discharging gas to a gas-using zone, and the gas source includes a pressure-regulated gas source vessel containing the gas at superatmospheric pressure. The pressure-regulated gas source vessel can be arranged with a pressure regulator at or within the vessel and a flow control valve coupled in flow relationship to the vessel, so that gas dispensed from the vessel flows through the regulator prior to flow through the flow control valve, and into the gas manifold. The apparatus and method permit an enhancement of the safety of storage and dispensing of toxic or otherwise hazardous gases used in semiconductor processes.Type: GrantFiled: November 10, 2009Date of Patent: September 21, 2010Assignee: Advanced Technology Materials, Inc.Inventors: W. Karl Olander, Matthew B. Donatucci, Luping Wang, Michael J. Wodjenski
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Publication number: 20100213083Abstract: Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.Type: ApplicationFiled: May 3, 2006Publication date: August 26, 2010Applicant: ADVANCED TECHNOLOGY MATERIALS, INC.Inventors: W. Karl Olander, James V. McManus, Steven J. Hultquist, Jose I. Arno, Peter C. Van Buskirk