Abstract: A method and apparatus for efficiently depositing a dielectric film with a preselected thickness pattern, in particular, a homogeneous, uniform diamond or diamond-like film, on large area substrates through the use of opposing plasma torches and linearly superimposing of microwave modes within the reaction chamber creating and maintaining an extended linear plasma in close proximity to the substrate surfaces and utilizing laminar flow of the reactant gases in the plasma and over the surfaces. Substrate surfaces can be moved past the opposing torches permitting the coating of large area, rectangularly-shaped substrate surfaces in a simple manner. Alternatively, the plasma horn or horns can be moved across the substrate permitting coating of large area, rectangularly-shaped substrate surfaces.

Abstract: A sensing system with a multichannel fiber optic bundle (MFOB) sensitive probe for measuring displacement, vibrations, roughness and two angles between a probe tip and light reflected target. The MFOB sensitive probe includes three branches of transmitting and receiving channels. The tip end of the MFOB is arranged in a rectangular 3*3 matrix formation. The other end of the MFOB includes eleven optical tips and connectors for optically connecting the tip of each channel, through optical filters, with light sensors and light sources. The sensing system further includes an electronic portion, having a thermostabilized box, an analog portion of an electronic module, a multifunction input/output board for use with a computer, and a controller for programmably controlling and measuring all parameters using computer analysis.