Abstract: The present invention refers to an apparatus (100) and a method for detecting characteristics of a probe. In an embodiment, the apparatus (100) comprises a vacuum chamber (104) and a beam generator (102) adapted to generate a beam of charged particles within the vacuum chamber (104). When the beam of charged particles falls onto the probe, interaction particles and/or interaction radiation are generated. The apparatus (100) further comprises an electromechanical unit (114) within the vacuum chamber (104) and a detector (110) comprising a plurality of detection units and being arranged on the electromechanical unit (114) allowing for the detector (110) to move from a first position (302) with respect to the beam generator (102) to a second position (304) with respect to the beam generator (102) and vice versa, upon a corresponding actuation of the electromechanical unit (114) performable from outside of the vacuum chamber (104).

Abstract: The present invention refers to an apparatus (100) and a method for detecting characteristics of a probe. In an embodiment, the apparatus (100) comprises a vacuum chamber (104) and a beam generator (102) adapted to generate a beam of charged particles within the vacuum chamber (104). When the beam of charged particles falls onto the probe, interaction particles and/or interaction radiation are generated. The apparatus (100) further comprises an electromechanical unit (114) within the vacuum chamber (104) and a detector (110) comprising a plurality of detection units and being arranged on the electromechanical unit (114) allowing for the detector (110) to move from a first position (302) with respect to the beam generator (102) to a second position (304) with respect to the beam generator (102) and vice versa, upon a corresponding actuation of the electromechanical unit (114) performable from outside of the vacuum chamber (104).

Abstract: The invention relates to a photon detector (10), in particular an x-ray detector, in the form of a measurement finger, which extends along a detector axis (23) and has a detector head (11) at a first end of the measurement finger, wherein the detector head (11) comprises a plurality of at least two detector modules (22), each comprising a sensor chip (12) sensitive to photon radiation (14), in particular x-radiation, said sensor chip having an exposed end face (13) and a face facing away from the end face (13), wherein the detector modules (22) are arranged around the detector axis (23) in a plane (24) extending orthogonally to the detector axis (23).

Abstract: The invention relates to a photon detector (10), in particular an x-ray detector, in the form of a measurement finger, which extends along a detector axis (23) and has a detector head (11) at a first end of the measurement finger, wherein the detector head (11) comprises a plurality of at least two detector modules (22), each comprising a sensor chip (12) sensitive to photon radiation (14), in particular x-radiation, said sensor chip having an exposed end face (13) and a face facing away from the end face (13), wherein the detector modules (22) are arranged around the detector axis (23) in a plane (24) extending orthogonally to the detector axis (23).

Abstract: The invention relates to a photon detector (10), in particular an x-ray detector, in the form of a measurement finger, which extends along a detector axis (23) and has a detector head (11) at a first end of the measurement finger, wherein the detector head (11) comprises a plurality of at least two detector modules (22), each comprising a sensor chip (12) sensitive to photon radiation (14), in particular x-radiation, said sensor chip having an exposed end face (13) and a face facing away from the end face (13), wherein the detector modules (22) are arranged around the detector axis (23) in a plane (24) extending orthogonally to the detector axis (23).

Abstract: The invention relates to a photon detector (10), in particular an x-ray detector, in the form of a measurement finger, which extends along a detector axis (23) and has a detector head (11) at a first end of the measurement finger, wherein the detector head (11) comprises a plurality of at least two detector modules (22), each comprising a sensor chip (12) sensitive to photon radiation (14), in particular x-radiation, said sensor chip having an exposed end face (13) and a face facing away from the end face (13), wherein the detector modules (22) are arranged around the detector axis (23) in a plane (24) extending orthogonally to the detector axis (23).