Abstract: A Micro Electro-Mechanical System (MEMS) switch (100) having a bottom electrode (116) formed over a substrate (112) and a thin protective cap layer (130) disposed over the bottom electrode (116). A dielectric material (118) is disposed over the protective cap layer (130) and a pull-down electrode (122) is formed over the spacer (120) and the dielectric material (118). The protective cap layer (130) prevents the oxidation of the bottom electrode (116). The thin protective cap layer (130) comprises a metal having an associated oxide with a high dielectric constant. A portion (132) of the thin protective cap layer (130) may oxidize during the formation of the dielectric material (118), increasing the capacitance of the dielectric stack (128).

Abstract: A liquid is supplied to a vessel (10) to form a pool (21) from which it discharges through a venturi. A supply pipe or pipes (12, 30) convey other liquids and/or gases from separate sources or from above the liquid pool into the venturi for mixing with the liquid. The supply pipes can extend through the pool and be perforated (22) to tend to maintain the level of the pool. Associated with the venturi are pressure sensors (40, 41) for measuring flow and a densiometer (52) permitting mass flow rate measurement of gas and liquid phases. The apparatus can be incorporated in a cartridge (60) for reception in a receptacle (61) at a subsea installation.

Abstract: The gas and water content of crude oil flowing through a pipeline is measured using a flow restriction in the pipeline, a radioactive source for providing separate radiation energies for each component to be measured, a detector for detecting the radiation transmitted by the various components to generate a first set of signals, pressure gauges upstream of and in the flow restriction for providing a second set of signals, and a signal processor for correlating the signals to provide mass flowrate values indicative of the relative proportions of the components of the mixture. The temperature of the mixture in the flow restriction can also be measured and fed to the signal processor for ensuring that accurate values of flowrate are obtained when temperatures vary.