Abstract: A multi-operation wafer baking system includes a chassis; a wafer loading device mounted on the chassis for laterally moving a wafer; a cruciform transportation device mounted on the chassis for receiving a wafer from the wafer loading device and including a base, an elevation platform, and a rotation platform mounted on the elevation platform and having four carrier arms for carrying wafers; an annular baking device mounted on the chassis to oppose the cruciform transportation device and including a central turn table, a plurality of wafer racks, and a plurality of baking tray assemblies functioning to receive wafers from corresponding wafer racks for performing a baking operation on the wafer; and an unloading device mounted on the chassis for receiving baked wafers. This system allows for baking wafers in a multi-operation manner to thereby improve throughput.

Abstract: A multi-operation wafer baking system includes a chassis; a wafer loading device mounted on the chassis for laterally moving a wafer; a cruciform transportation device mounted on the chassis for receiving a wafer from the wafer loading device and including a base, an elevation platform, and a rotation platform mounted on the elevation platform and having four carrier arms for carrying wafers; an annular baking device mounted on the chassis to oppose the cruciform transportation device and including a central turn table, a plurality of wafer racks, and a plurality of baking tray assemblies functioning to receive wafers from corresponding wafer racks for performing a baking operation on the wafer; and an unloading device mounted on the chassis for receiving baked wafers. This system allows for baking wafers in a multi-operation manner to thereby improve throughput.

Abstract: A novel cleaning device for removing the particles and residual chemicals from the surfaces of optical objects is provided herein. The cleaning device mainly integrates a driving mechanism for spinning the object to be cleaned, and an advancing mechanism to lift the object in and out of the cleaning device. The driving mechanism has adjustment means for adjusting the level of the object so that the object could be rotated at very high speed but with superior stability. The advancing mechanism reduces manual intervention in the cleaning process and thereby reduces the possibility of contamination to the object after it is cleaned.

Abstract: An optical inspection device is provided herein to achieve the accuracy and convenience of inspecting optical glasses and planar optical objects. The optical inspection device mainly has the optical inspection lenses installed on the arms of a U-shape member that surrounds the object to be examined. Then, by moving the U-shaped member along orthogonal directions, the entire surface of the object could be examined accurately.