Patents by Inventor Walter Class

Walter Class has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Structures and methods for measuring beam angle in an ion implanter
    Patent number: 7728293
    Abstract: The present invention involves an ion beam angular measurement apparatus for providing feedback for a predetermined set ion beam angle comprising an arrangement of composite pillars formed on an insulating material and wherein the composite pillars selectively allow ion beams to penetrate a first layer of a pillar, wherein resistivity measurements are taken for each of the composite pillars before and after test ion beam implantation and wherein the resistivity measurements yield information relating to an angle of the ion beam during test.
    Type: Grant
    Filed: November 29, 2007
    Date of Patent: June 1, 2010
    Assignee: Axcelis Technologies, Inc.
    Inventors: Leonard M. Rubin, Ivan Berry, Walter Class
  • STRUCTURES AND METHODS FOR MEASURING BEAM ANGLE IN AN ION IMPLANTER
    Publication number: 20090140717
    Abstract: The present invention involves an ion beam angular measurement apparatus for providing feedback for a predetermined set ion beam angle comprising an arrangement of composite pillars formed on an insulating material and wherein the composite pillars selectively allow ion beams to penetrate a first layer of a pillar, wherein resistivity measurements are taken for each of the composite pillars before and after test ion beam implantation and wherein the resistivity measurements yield information relating to an angle of the ion beam during test.
    Type: Application
    Filed: November 29, 2007
    Publication date: June 4, 2009
    Inventors: Leonard M. Rubin, Ivan Berry, Walter Class