Patents by Inventor Walter Garwacki

Walter Garwacki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4053334
    Abstract: A method for independent control of a plurality of volatile dopants in liquid phase epitaxial fabrication of doped layers of semiconductors upon a semiconductor substrate, utilizes spatially separated sources of each dopant, each source being independently temperature controlled. One dopant source is located in a melt of a carrier metal and of the elements required to form the desired semiconductor material and has the saturation concentration thereof determined by the temperature of the melt, while the remaining dopant is vaporized to create a partial pressure thereof over the melt, with control of the source temperature controlling partial pressure and therefore concentration, which is less than or equal to the solubility of the remaining dopant at the melt temperature, in the melt.
    Type: Grant
    Filed: July 21, 1976
    Date of Patent: October 11, 1977
    Assignee: General Electric Company
    Inventors: Roger S. Ehle, Walter Garwacki