Patents by Inventor Walter Greve

Walter Greve has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cathodic system with target, for vacuum sputtering apparatus for the application of dielectric or nonmagnetic coatings to substrates
    Patent number: 4247383
    Abstract: A cathodic system has a planar target for use in an atomizing apparatus for the sputtering of a dielectric or nonmagnetic coating onto a substrate. The cathodic system includes a magnetic field generator disposed on the side of the target opposite from that of the substrate and is constructed in the form of a planar coil which is disposed parallel to the target and has an area which corresponds substantially to the area of the target. The planar coil is insulated from the target and is cooled during use.
    Type: Grant
    Filed: August 2, 1978
    Date of Patent: January 27, 1981
    Assignee: Leybold Heraeus GmbH
    Inventors: Walter Greve, Edgar Kaiser, Dieter Grone, Ulrich Patz