Patents by Inventor Walter H. Johnson

Walter H. Johnson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220137380
    Abstract: A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.
    Type: Application
    Filed: October 19, 2021
    Publication date: May 5, 2022
    Inventors: Alex ZHENG, Jun WANG, David Y. WANG, Chunxia LI, Changfei YAN, Rui NI, Lansheng DONG, Yang ZHOU, Hai-Yang YOU, Haijing PENG, Walter H. JOHNSON, Shankar KRISHNAN, Jianou SHI
  • Patent number: 11249110
    Abstract: Resistivity probes can be used to test integrated circuits. In one example, a resistivity probe has a substrate with multiple vias and multiple metal pins. Each of the metal pins is disposed in one of the vias. The metal pins extend out of the substrate. Interconnects provide an electrical connection to the metal pins. In another example, a resistivity probe has a substrate with a top surface and multiple elements extending from the substrate. Each of the elements curves from the substrate to a tip of the element such that each of the elements is non-parallel to the top surface of the substrate.
    Type: Grant
    Filed: November 10, 2019
    Date of Patent: February 15, 2022
    Assignee: KLA-Tencor Corporation
    Inventors: Walter H. Johnson, III, Nanchang Zhu, Xianghua Liu, Jianli Cui, Zhu-bin Shi, Zhuoxian Zhang, Haiyang You, Lu Yu, Jianou Shi, Fan Zhang
  • Patent number: 11043239
    Abstract: A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: June 22, 2021
    Assignee: KLA Corporation
    Inventors: Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong, Yang Zhou, Hai-Yang You, Haijing Peng, Jianou Shi, Rui Ni, Shankar Krishnan, David Y. Wang, Walter H. Johnson
  • Publication number: 20200302965
    Abstract: A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.
    Type: Application
    Filed: March 17, 2020
    Publication date: September 24, 2020
    Inventors: Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong, Yang Zhou, Hai-Yang You, Haijing Peng, Jianou Shi, Rui Ni, Shankar Krishnan, David Y. Wang, Walter H. Johnson, Barry Blasenheim
  • Publication number: 20200072869
    Abstract: Resistivity probes can be used to test integrated circuits. In one example, a resistivity probe has a substrate with multiple vias and multiple metal pins. Each of the metal pins is disposed in one of the vias. The metal pins extend out of the substrate. Interconnects provide an electrical connection to the metal pins. In another example, a resistivity probe has a substrate with a top surface and multiple elements extending from the substrate. Each of the elements curves from the substrate to a tip of the element such that each of the elements is non-parallel to the top surface of the substrate.
    Type: Application
    Filed: November 10, 2019
    Publication date: March 5, 2020
    Inventors: Walter H. Johnson, III, Nanchang Zhu, Xianghua Liu, Jianli Cui, Zhu-bin Shi, Zhuoxian Zhang, Haiyang You, Lu Yu, Jianou Shi, Fan Zhang
  • Patent number: 10514391
    Abstract: Resistivity probes can be used to test integrated circuits. In one example, a resistivity probe has a substrate with multiple vias and multiple metal pins. Each of the metal pins is disposed in one of the vias. The metal pins extend out of the substrate. Interconnects provide an electrical connection to the metal pins. In another example, a resistivity probe has a substrate with a top surface and multiple elements extending from the substrate. Each of the elements curves from the substrate to a tip of the element such that each of the elements is non-parallel to the top surface of the substrate.
    Type: Grant
    Filed: August 1, 2017
    Date of Patent: December 24, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Walter H. Johnson, III, Nanchang Zhu, Xianghua Liu, Jianli Cui, Zhu-bin Shi, Zhuoxian Zhang, Haiyang You, Lu Yu, Jianou Shi, Fan Zhang
  • Patent number: 10231337
    Abstract: Printed circuit assemblies comprising two or more printed circuit boards stacked and/or folded together and related methods. In some embodiments, a first printed circuit board comprising a first plurality of electrical components may be coupled with a second printed circuit board comprising a second plurality of electrical components using a flexible coupling member. The first printed circuit board may be stacked on top of the second printed circuit board and coupled using an adhesive layer positioned in between the first printed circuit board and the second printed circuit board. The adhesive layer may be configured to maintain the first printed circuit board in a stacked configuration with respect to the second printed circuit board.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: March 12, 2019
    Assignee: Inertial Sense, Inc.
    Inventor: Walter H. Johnson
  • Publication number: 20180052189
    Abstract: Resistivity probes can be used to test integrated circuits. In one example, a resistivity probe has a substrate with multiple vias and multiple metal pins. Each of the metal pins is disposed in one of the vias. The metal pins extend out of the substrate. Interconnects provide an electrical connection to the metal pins. In another example, a resistivity probe has a substrate with a top surface and multiple elements extending from the substrate. Each of the elements curves from the substrate to a tip of the element such that each of the elements is non-parallel to the top surface of the substrate.
    Type: Application
    Filed: August 1, 2017
    Publication date: February 22, 2018
    Inventors: Walter H. Johnson, III, Nanchang Zhu, Xianghua Liu, Jianli Cui, Zhu-bin Shi, Zhuoxian Zhang, Haiyang You, Lu Yu, Jianou Shi, Fan Zhang
  • Patent number: 9778043
    Abstract: Microchip assemblies, such as self-contained, aided, INS microchip assemblies configured for being coupled with a circuit board or another electrical component. In some embodiments, two inertial navigation sensors may be provided, along with a receiver configured to receive an external signal comprising location data or another aiding sensor, such as a barometric pressure sensor, magnetometer, or WIFI receiver. The assembly may further comprise a processor configured to receive inertial parameter data from inertial navigation sensors and location data from the receiver, and may be configured to process the inertial parameter data and location data to output inertial navigation information.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: October 3, 2017
    Assignee: INERTIAL SENSE, LLC
    Inventor: Walter H. Johnson
  • Patent number: 9435826
    Abstract: A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.
    Type: Grant
    Filed: May 6, 2013
    Date of Patent: September 6, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Walter H. Johnson, Jianou Shi, Lansheng Dong, Haijing Peng, Xianghua Liu, Jiazhou Jin, Zhuoxian Zhang, Nanchang Zhu
  • Publication number: 20160174378
    Abstract: Printed circuit assemblies comprising two or more printed circuit boards stacked and/or folded together and related methods. In some embodiments, a first printed circuit board comprising a first plurality of electrical components may be coupled with a second printed circuit board comprising a second plurality of electrical components using a flexible coupling member. The first printed circuit board may be stacked on top of the second printed circuit board and coupled using an adhesive layer positioned in between the first printed circuit board and the second printed circuit board. The adhesive layer may be configured to maintain the first printed circuit board in a stacked configuration with respect to the second printed circuit board.
    Type: Application
    Filed: December 16, 2015
    Publication date: June 16, 2016
    Inventor: Walter H. Johnson
  • Patent number: 9030219
    Abstract: A variable pressure probe pin device, including: a housing with a channel having a first longitudinal axis; a probe at least partially disposed in the channel and including a plurality of probe pins configured to measure a property of a conductive layer; and a fluid pressure system configured to supply pressurized fluid o the channel to control a position of the probe within the channel. The housing or the probe is displaceable such that the plurality of probe pins contact the conductive layer.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: May 12, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Walter H. Johnson, Nanchang Zhu
  • Publication number: 20130300445
    Abstract: A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.
    Type: Application
    Filed: May 6, 2013
    Publication date: November 14, 2013
    Inventors: Walter H. Johnson, Jianou Shi, Lansheng Dong, Haijing Peng, Xianghua Liu, Jiazhou Jin, Zhuoxian Zhang, Nanchang Zhu
  • Publication number: 20130229196
    Abstract: A variable pressure probe pin device, including: a housing with a channel having a first longitudinal axis; a probe at least partially disposed in the channel and including a plurality of probe pins configured to measure a property of a conductive layer; and a fluid pressure system configured to supply pressurized fluid o the channel to control a position of the probe within the channel. The housing or the probe is displaceable such that the plurality of probe pins contact the conductive layer.
    Type: Application
    Filed: February 27, 2013
    Publication date: September 5, 2013
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Walter H. Johnson, Nanchang Zhu
  • Patent number: 7302316
    Abstract: A system and method for providing autonomous control of unmanned aerial vehicles (UAVs) is disclosed. The system includes a ground station in communication with an unmanned aerial vehicle. The method for providing autonomous control of a UAV includes methods for processing communications between the ground station and UAV. The method also includes procedures for processing commands from the ground station. Also included in the method is a process for estimating the attitude of the UAV and autonomously maintaining its altitude within a desired threshold. The method also includes a process for autonomously orbiting about a specified point in space. Combined with these processes, the method also includes a process for an autonomous takeoff and landing of the UAV.
    Type: Grant
    Filed: September 14, 2004
    Date of Patent: November 27, 2007
    Assignee: Brigham Young University
    Inventors: Randal W. Beard, Walter H. Johnson, Reed Christiansen, Joshua M. Hintze, Timothy W. McLain
  • Patent number: 7050160
    Abstract: A process for measuring both the reflectance and sheet resistance of a thin film, such as a metal film or a doped semiconductor, in a common apparatus comprises: directing a beam of radiation from a radiation source on the common apparatus onto a portion of the surface of the thin film, sensing the amount of radiation reflected from the surface of the thin film, and contacting the surface of the thin film with a sheet resistance measurement apparatus on the apparatus at a portion of the surface of the thin film coincident with or adjacent to the portion of the thin film contacted by the radiation beam to measure the sheet resistance of the thin film. The sheet resistance measurement apparatus may, by way of example, comprise a 4 point probe or an eddy current measurement apparatus. The respective measurements may be carried out either simultaneously or sequentially.
    Type: Grant
    Filed: April 3, 2003
    Date of Patent: May 23, 2006
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Walter H. Johnson, Jagadish Kalyanam, Shankar Krishnan, Murali K. Narasimhan
  • Patent number: 6815959
    Abstract: A pin configured to be disposed within a probe is provided. The probe may be configured to measure a property of a conductive layer. The pin may include a contact surface which may be substantially planar. The pin may also include a first portion extending from the contact surface. A cross-sectional area of the first portion, in a direction substantially parallel to the contact surface, may be substantially equal to a surface area of the contact surface across a length of the first portion. A system configured to measure a property of a conductive layer is also provided. The system may include a mounting device and at least two probes coupled to the mounting device. The probes may be configured to measure the property of a conductive layer. In addition, the mounting device may be configured such that one of the probes may contact the conductive layer during measurement.
    Type: Grant
    Filed: April 9, 2002
    Date of Patent: November 9, 2004
    Assignee: KLA-Tencor Technologies Corp.
    Inventors: Walter H. Johnson, Torsten Borchers, Daniel Griffing, Andrei Danet, George Erskine
  • Publication number: 20030060092
    Abstract: A pin configured to be disposed within a probe is provided. The probe may be configured to measure a property of a conductive layer. The pin may include a contact surface which may be substantially planar. The pin may also include a first portion extending from the contact surface. A cross-sectional area of the first portion, in a direction substantially parallel to the contact surface, may be substantially equal to a surface area of the contact surface across a length of the first portion. A system configured to measure a property of a conductive layer is also provided. The system may include a mounting device and at least two probes coupled to the mounting device. The probes may be configured to measure the property of a conductive layer. In addition, the mounting device may be configured such that one of the probes may contact the conductive layer during measurement.
    Type: Application
    Filed: April 9, 2002
    Publication date: March 27, 2003
    Inventors: Walter H. Johnson, Torsten Borchers, Daniel Griffing, Andrei Danet, George Erskine
  • Patent number: 5260668
    Abstract: The resistivity of the surface of a semiconductor wafer is measured at different temperatures to determine the resistivity as a function of temperature. The temperature of the semiconductor wafer is varied by a heater in thermal contact with the semiconductor wafer, and the temperature is measured by a temperature sensor in thermal contact with the semiconductor. The heater is controlled by a control unit which adjusts the amount of heat provided by the heater, thereby controlling the temperature at which a measurement from a four-point resistivity probe is taken.
    Type: Grant
    Filed: June 11, 1992
    Date of Patent: November 9, 1993
    Assignee: Prometrix Corporation
    Inventors: Chester L. Mallory, Walter H. Johnson, Wayne K. Borglum