Abstract: The present invention relates to methods and systems for processing an exhaust stream containing a recyclable component mixed with other components and impurities to produce a high purity product that contains all of the recyclable component. One or more waste streams containing none of the recyclable component are also produced. The present invention particularly relates to the recovery of valuable recyclable components used in the manufacture of semiconductor devices.

Abstract: The present invention relates to methods and systems for processing an exhaust stream containing a recyclable component mixed with other components and impurities to produce a high purity product that contains all of the recyclable component. One or more waste streams containing none of the recyclable component are also produced. The present invention particularly relates to the recovery of valuable recyclable components used in the manufacture of semiconductor devices.

Abstract: A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.

Abstract: The present invention provides generally a method and apparatus for purifying a liquid. More particularly, purification of a bulk liquid is performed by introducing a liquid stream to a purification vessel, which comprises both a distillation chamber for forming a purified vapor and an annular chamber for collecting a purified liquid that is condensed from the purified vapor. A refrigerant system provides thermodynamic efficiency in the purification method by directing waste heat generated in one part of the refrigerant system for heating duty in another part of the refrigerant system. The method and apparatus can be applied to producing purified carbon dioxide, nitrous oxide, ammonia and fluorocarbons.

Abstract: The present invention provides generally a method and apparatus for purifying a liquid. More particularly, purification of a bulk liquid is performed by introducing a liquid stream to a purification vessel, which comprises both a distillation chamber for forming a purified vapor and an annular chamber for collecting a purified liquid that is condensed from the purified vapor. A refrigerant system provides thermodynamic efficiency in the purification method by directing waste heat generated in one part of the refrigerant system for heating duty in another part of the refrigerant system. The method and apparatus can be applied to producing purified carbon dioxide, nitrous oxide, ammonia and fluorocarbons.

Abstract: A method and apparatus is disclosed for producing fluorine by providing a contained fluorine precursor source located proximate to or remotely from an adsorbent bed, optionally in a replaceable unit that may be a replaceable module comprising both the fluorine source and the adsorbent bed. Fluorine derived preferably from a nitrogen trifluoride source and used to remove deposited silicon-containing impurities in reaction chambers is reclaimed from an adsorbent bed, and made available to the reaction chamber as a supplemental fluorine source to reduce the total required amount of nitrogen trifluoride source gas. The separation column adsorbent is regenerated in cyclical intervals using a reverse flow of inert gas.

Abstract: A gas mixture comprised of nitric oxide and one or more impurities selected from nitrous oxide, nitrogen dioxide, nitrous acid, sulfur dioxide, carbonyl sulfide, water vapor and carbon dioxide is purified by pressure swing adsorption or temperature swing adsorption using a porous, metal-free polymer adsorbent that does not promote the disproportionation of nitric oxide to nitrogen dioxide and nitrogen or nitrous oxide. The adsorption step is preferably carried out at tempereatures in the range of about −120 to about 0° C.

Abstract: An apparatus and method for purifying boron trichloride by removal of phosgene. In accordance with the invention, phosgene is photolytically decomposed into carbon monoxide and chlorine and liquid vapor phase in equilibrium with one another and in solution with the boron trichloride. This equilibrium is disturbed preferably by sparging a vapor stream that rises through the boron trichloride and is composed of the substance, such as nitrogen, to disturb the equilibrium and thereby cause the carbon monoxide and chlorine to be carried out of solution and collect in the overhead space. The decomposition product of chlorine and carbon monoxide can then be removed from the vapor space so that the carbon monoxide and chlorine to not recombine and contaminant the boron trichloride with phosgene.

Abstract: An apparatus and method for purifying boron trichloride by removal of phosgene. In accordance with the invention, phosgene is photolytically decomposed into carbon monoxide and chlorine and liquid vapor phase in equilibrium with one another and in solution with the boron trichloride. This equilibrium is disturbed preferably by sparging a vapor stream that rises through the boron trichloride and is composed of the substance, such as nitrogen, to disturb the equilibrium and thereby cause the carbon monoxide and chlorine to be carried out of solution and collect in the overhead space. The decomposition product of chlorine and carbon monoxide can then be removed from the vapor space so that the carbon monoxide and chlorine does not recombine and contaminate the boron trichloride with phosgene.

Abstract: A method and apparatus for purifying a substance in which the substance is rectified within first and second distillation columns to produce a tower overhead in the second distillation column, lean in both heavy and light impurities. The column bottoms produced within the second distillation columns is boiled to provide boil-up within the second distillation column, thereby to initiate formation of an ascending vapor phase. A vapor stream in removed from the second distillation and then fed into a bottom region of the first distillation column to initiate formation of the ascending vapor phase therein. The vapor stream removed from the second distillation column is formed from the ascending vapor phase produced within the second distillation column. The second distillation column is reboiled by a reboiler that can include a reservoir containing a heat exchange fluid that condenses against boiling the column bottoms provided in the second distillation column.

Abstract: A cryogenic station for delivering a cryogen substantially free of higher boiling impurities. The cryogenic station includes an insulated main tank and an auxiliary tank. Liquid stored in the main tank and pressurized by a pressure building circuit is driven into the auxiliary tank. Cryogenic vapor formed in the auxiliary tank is warmed to ambient temperature by an external heat exchanger and is then recirculated back to an internal heat exchanger located within the auxiliary tank. The internal heat exchanger is configured such that a portion of the cryogen driven into the auxiliary tank is vaporized to form the cryogenic vapor and a remaining portion of such cryogen is left within the auxiliary tank to substantially retain the higher boiling impurities in a solidified state. As such, the cryogenic vapor is substantially free from the impurities when delivered as a product stream.

Abstract: The present invention provides a method of analyzing a gas sample for trace impurity concentration by atmospheric pressure ionization mass spectroscopy. In accordance with the present invention, moisture is removed from the gas sample before analysis by passing the gas sample through a dried bed of silica gel. The bed of silica gel is sufficiently dried so that remaining moisture present in the gas sample after passage through the bed is at a sufficiently low concentration such that the trace impurity concentration as analyzed by atmospheric ionization mass spectroscopy will not be effected by the remaining moisture.

Abstract: The present invention provides an apparatus for forming a mixture containing a regulated, low concentration of a target component within a carrier fluid. In accordance with the present invention, the carrier fluid is passed through the bed including a compound having two phases with one of the two phases containing the target component. A vapor phase of the target component exists within the bed in equilibrium with the target component contained within at least one of the two phases. The vapor phase has a partial pressure dependent upon bed temperature. The carrier fluid is then passed through the bed so that it contains the target component upon leaving the bed at essentially the partial pressure of the vapor phase. The target component concentration is dependent upon a quotient of the partial pressure of the vapor phase and carrier fluid total pressure. Regulation of the bed temperature and carrier fluid total pressure will in turn regulate the concentration of the target component within the carrier fluid.

Abstract: The present invention provides a cryogenic storage container having a pressure vessel surrounded by a vacuum vessel for maintaining a vacuum between the outer wall of the vacuum vessel and the pressure vessel. A pair of intermediate and sub-intermediate heat shields are disposed between the outer wall of the vacuum vessel and the pressure vessel for intercepting the heat that would otherwise be transferred from the vacuum vessel to the pressure vessel. The heat intercepted by the intermediate heat shield is absorbed by liquid nitrogen contained within a liquid nitrogen container. The heat intercepted by the sub-intermediate heat shield is preferably absorbed by liquid neon in a liquid neon storage tank. The liquid nitrogen and neon absorb heat by undergoing a phase change, from liquid to vapor. In order to prevent failure of the liquid nitrogen container, the nitrogen is vented to the atmosphere over a period of time.

Abstract: Apparatus for removing small particles from a substrate comprising a source of fluid carbon dioxide, a first means for expanding a portion of the fluid carbon dioxide into a first mixture containing gaseous carbon dioxide and fine droplets of liquid carbon dioxide, coalescing means for converting the first mixture into a second mixture containing gaseous carbon dioxide and larger liquid droplets of carbon dioxide, second expansion means for converting said second mixture into a third mixture containing solid particles of carbon dioxide and gaseous carbon dioxide, and means for directing said third mixture toward the substrate. Also disclosed are methods for removing fine particles from substrates utilizing the subject apparatus.

Abstract: An inert gas stream containing parts per million levels of impurities such as O.sub.2, CO, CO.sub.2, H.sub.2, H.sub.2 O, is purified by passing the same sequentially through a first bed and second bed of material. In the first bed, carbon monoxide and hydrogen are both reacted with oxygen to form CO.sub.2 and H.sub.2 O. The latter is retained in this first bed while the reaction products and the inert gas stream are supplied to a second of material which is comprised of a getter. In this bed, oxygen reacts with the getter material and carbon dioxide is adsorbed therein so that the inert gas stream leaving the second bed is substantially free of such impurities. The first and second beds of material operate at temperatures up to about 38.degree. and these materials may be regenerated by heating the same to approximately 200.degree. C. and purging such beds with a purge gas flow.