Abstract: A substrate table (4) is fixed to a rotatably mounted hollow shaft (3) in a vacuum coating tank (1). The shaft (3) has a first portion passing sealingly through a wall of the tank and a second portion which has a larger diameter than the first portion in the tank. The first portion has axial supply passages connected to a chamber in the second portion where electrical connectors and coolant distribution means are housed.

Abstract: A vaporizer for vacuum deposition installations has at least one crucible and a plurality of crucible-receiving recesses movable into a vaporizing position, a vapor-conducting device and a shutter for interrupting the flow of vapor. The vaporizer is capable of enabling a plurality of different substances to be vaporized in succession without mutual contamination by providing the vapor-conducting device wherein the device has a plurality of vapor screens which can be individually set down at the edges of the crucible-receiving recesses by relative movement between the vapor-conducting device and the crucible. The shutters have a plurality of lobes which can be individually moved over the particular vapor screen located in the vaporizing position. The drives associated with the vapor-conducting device and shutter are interconnected such that the same vapor screen and the same shutter lobe are always associated with a particular crucible-receiving recess.

Abstract: An operating mechanism for valves and the like comprises a housing with a port situated therein which is to be opened and closed. Associated with the port is a seat and a valve plate for closing the port. A rotatable shaft drive mechanism for the valve plate includes a shaft which rotates in one direction to effect movement of the valve plate from its open position to its closed position followed by a pressing movement over the valve plate against the seat and rotates in the other direction to effect movement of the valve plate in the opposite direction. The rotatable shaft drive mechanism includes an intermittent drive for the transformation of the rotatory movement of the shaft to the desired movement of the valve plate.

Abstract: Electron gun for heating, melting and vaporizing purposes having an electron-emitting cathode, at least one beam-forming electrode associated with the cathode, an accelerating anode, an electromagnetic lens and a beam guiding-tube extending in the direction of the beam path and surrounded by an electromagnetic deflection system for the x-axis deflection and one for the y-axis deflection. An envelope tube is disposed outside of the deflection systems and is joined at its extremity to the end of the beam guiding tube by an end plate through which the pole shoes of the x-axis deflection system are brought. The end plate is inclined towards the cathode beginning from the pole shoes of the x-axis deflection system.

Abstract: An electron gun for heating, fusing and vaporizing having a high voltage portion, an electron emitting cathode and at least one beam forming electrode associated with the cathode. An accelerating anode, a beam guiding tube extending in the direction of the beam path and surrounded by a jacket tube and an electromatic lens are also provided. One or more deflection systems are positioned in the space formed between the beam guiding tube and the jacket tube. The beam guiding tube, the jacket tube, the electromatic lens and the deflection systems are contained in a single, replaceable unit which is joined by a plurality of hollow posts parallel to the gun axis to the high-voltage portion of the gun. The space for the electromagnetic lens and the deflection systems communicates with the atmosphere through at least one of the hollow posts.