Patents by Inventor Walter Kleemeier
Walter Kleemeier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11205621Abstract: A device is provided that includes a first die having a first alignment structure that includes a plurality of first transmission columns arranged in a pattern and a second die positioned on the first die, the second die having a second alignment structure that includes a plurality of second transmission columns arranged in the same pattern as the first transmission columns. The first and second transmission columns are each coplanar with a first surface and a second surface of the first and second die, respectively.Type: GrantFiled: March 3, 2020Date of Patent: December 21, 2021Assignee: STMICROELECTRONICS, INC.Inventors: John H. Zhang, Walter Kleemeier, Paul Ferreira, Ronald K. Sampson
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Publication number: 20200203286Abstract: A device is provided that includes a first die having a first alignment structure that includes a plurality of first transmission columns arranged in a pattern and a second die positioned on the first die, the second die having a second alignment structure that includes a plurality of second transmission columns arranged in the same pattern as the first transmission columns. The first and second transmission columns are each coplanar with a first surface and a second surface of the first and second die, respectively.Type: ApplicationFiled: March 3, 2020Publication date: June 25, 2020Inventors: John H. ZHANG, Walter KLEEMEIER, Paul FERREIRA, Ronald K. SAMPSON
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Patent number: 10615125Abstract: A device is provided that includes a first die having a first alignment structure that includes a plurality of first transmission columns arranged in a pattern and a second die positioned on the first die, the second die having a second alignment structure that includes a plurality of second transmission columns arranged in the same pattern as the first transmission columns. The first and second transmission columns are each coplanar with a first surface and a second surface of the first and second die, respectively.Type: GrantFiled: December 21, 2017Date of Patent: April 7, 2020Assignee: STMicroelectronics, Inc.Inventors: John H. Zhang, Walter Kleemeier, Paul Ferreira, Ronald K. Sampson
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Publication number: 20180114756Abstract: A device is provided that includes a first die having a first alignment structure that includes a plurality of first transmission columns arranged in a pattern and a second die positioned on the first die, the second die having a second alignment structure that includes a plurality of second transmission columns arranged in the same pattern as the first transmission columns. The first and second transmission columns are each coplanar with a first surface and a second surface of the first and second die, respectively.Type: ApplicationFiled: December 21, 2017Publication date: April 26, 2018Inventors: John H. ZHANG, Walter KLEEMEIER, Paul FERREIRA, Ronald K. SAMPSON
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Patent number: 9870999Abstract: A device is provided that includes a first die having a first alignment structure that includes a plurality of first transmission columns arranged in a pattern and a second die positioned on the first die, the second die having a second alignment structure that includes a plurality of second transmission columns arranged in the same pattern as the first transmission columns. The first and second transmission columns are each coplanar with a first surface and a second surface of the first and second die, respectively.Type: GrantFiled: November 24, 2015Date of Patent: January 16, 2018Assignee: STMICROELECTRONICS, INC.Inventors: John H. Zhang, Walter Kleemeier, Paul Ferreira, Ronald K. Sampson
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Patent number: 9646939Abstract: Various embodiments facilitate die protection for an integrated circuit. In one embodiment, a multilayer structure is formed in multiple levels and along the edges of a die to prevent and detect damages to the die. The multilayer structure includes a support layer, a first plurality of dielectric pillars overlying the support layer, a metal layer that fills spaces between the first plurality of dielectric pillars, an insulation layer overlying the first plurality of dielectric pillars and the metal layer, a second plurality of dielectric pillars overlying the insulation layer, and a second metal layer that fills spaces between the second plurality of dielectric pillars.Type: GrantFiled: April 5, 2016Date of Patent: May 9, 2017Assignees: International Business Machines Corporation, STMicroelectronics, Inc.Inventors: John H. Zhang, Lawrence A. Clevenger, Carl Radens, Yiheng Xu, Byoung Youp Kim, Walter Kleemeier
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Patent number: 9633909Abstract: An integrated circuit includes a substrate supporting a transistor having a source region and a drain region. A high dopant concentration delta-doped layer is present on the source region and drain region of the transistor. A set of contacts extend through a pre-metal dielectric layer covering the transistor. A silicide region is provided at a bottom of the set of contacts. The silicide region is formed by a salicidation reaction between a metal present at the bottom of the contact and the high dopant concentration delta-doped layer on the source region and drain region of the transistor.Type: GrantFiled: November 16, 2015Date of Patent: April 25, 2017Assignee: STMicroelectronics, Inc.Inventors: Walter Kleemeier, Qing Liu
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Patent number: 9543397Abstract: An integrated circuit transistor is formed on and in a substrate. A trench in the substrate is at least partially filed with a metal material to form a source (or drain) contact buried in the substrate. The substrate further includes a source (or drain) region epitaxially grown above the source (or drain) contact. The substrate further includes a channel region adjacent to the source (or drain) region. A gate dielectric is provided on top of the channel region and a gate electrode is provided on top of the gate dielectric. The substrate is preferably of the silicon on insulator (SOI) type.Type: GrantFiled: November 3, 2015Date of Patent: January 10, 2017Assignee: STMICROELECTRONICS, INC.Inventors: Walter Kleemeier, John Hongguang Zhang
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Publication number: 20160300857Abstract: A junctionless field effect transistor on an insulating layer of a substrate includes a fin made of semiconductor material doped with a dopant of a first conductivity type. A channel made of an epitaxial semiconductor material region doped with a dopant of a second conductivity type is in contact with a top surface of the fin. An insulated metal gate straddles the channel. A source connection is made to the epitaxial semiconductor material region on one side of said insulated metal gate, and a drain connection is made to the epitaxial semiconductor material region on an opposite side of said insulated metal gate. The epitaxial channel may further be grown from and be in contact with opposed side surfaces of the fin.Type: ApplicationFiled: April 7, 2015Publication date: October 13, 2016Applicant: STMicroelectronics, Inc.Inventors: Qing Liu, John Hongguang Zhang, Walter Kleemeier
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Publication number: 20160218070Abstract: Various embodiments facilitate die protection for an integrated circuit. In one embodiment, a multilayer structure is formed in multiple levels and along the edges of a die to prevent and detect damages to the die. The multilayer structure includes a support layer, a first plurality of dielectric pillars overlying the support layer, a metal layer that fills spaces between the first plurality of dielectric pillars, an insulation layer overlying the first plurality of dielectric pillars and the metal layer, a second plurality of dielectric pillars overlying the insulation layer, and a second metal layer that fills spaces between the second plurality of dielectric pillars.Type: ApplicationFiled: April 5, 2016Publication date: July 28, 2016Inventors: John H. Zhang, Lawrence A. Clevenger, Carl Radens, Yiheng Xu, Byoung Youp Kim, Walter Kleemeier
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Patent number: 9337087Abstract: Various embodiments facilitate die protection for an integrated circuit. In one embodiment, a multilayer structure is formed in multiple levels and along the edges of a die to prevent and detect damages to the die. The multilayer structure includes a support layer, a first plurality of dielectric pillars overlying the support layer, a metal layer that fills spaces between the first plurality of dielectric pillars, an insulation layer overlying the first plurality of dielectric pillars and the metal layer, a second plurality of dielectric pillars overlying the insulation layer, and a second metal layer that fills spaces between the second plurality of dielectric pillars.Type: GrantFiled: December 30, 2014Date of Patent: May 10, 2016Assignees: STMicroelectronics, Inc., International Business Machines CorporationInventors: John H. Zhang, Lawrence A. Clevenger, Carl Radens, Yiheng Xu, Byoung Youp Kim, Walter Kleemeier
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Publication number: 20160118305Abstract: An integrated circuit includes a substrate supporting a transistor having a source region and a drain region. A high dopant concentration delta-doped layer is present on the source region and drain region of the transistor. A set of contacts extend through a pre-metal dielectric layer covering the transistor. A silicide region is provided at a bottom of the set of contacts. The silicide region is formed by a salicidation reaction between a metal present at the bottom of the contact and the high dopant concentration delta-doped layer on the source region and drain region of the transistor.Type: ApplicationFiled: November 16, 2015Publication date: April 28, 2016Applicant: STMICROELECTRONICS, INC.Inventors: Walter Kleemeier, Qing Liu
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Patent number: 9324660Abstract: A device is provided that includes a first die having a first alignment structure that includes a plurality of first transmission columns arranged in a pattern and a second die positioned on the first die, the second die having a second alignment structure that includes a plurality of second transmission columns arranged in the same pattern as the first transmission columns. The first and second transmission columns are each coplanar with a first surface and a second surface of the first and second die, respectively.Type: GrantFiled: September 26, 2013Date of Patent: April 26, 2016Assignee: STMicroelectronics, Inc.Inventors: John H. Zhang, Walter Kleemeier, Paul Ferreira, Ronald K. Sampson
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Publication number: 20160079131Abstract: A device is provided that includes a first die having a first alignment structure that includes a plurality of first transmission columns arranged in a pattern and a second die positioned on the first die, the second die having a second alignment structure that includes a plurality of second transmission columns arranged in the same pattern as the first transmission columns. The first and second transmission columns are each coplanar with a first surface and a second surface of the first and second die, respectively.Type: ApplicationFiled: November 24, 2015Publication date: March 17, 2016Inventors: John H. ZHANG, Walter KLEEMEIER, Paul FERREIRA, Ronald K. SAMPSON
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Publication number: 20160056249Abstract: An integrated circuit transistor is formed on and in a substrate. A trench in the substrate is at least partially filed with a metal material to form a source (or drain) contact buried in the substrate. The substrate further includes a source (or drain) region epitaxially grown above the source (or drain) contact. The substrate further includes a channel region adjacent to the source (or drain) region. A gate dielectric is provided on top of the channel region and a gate electrode is provided on top of the gate dielectric. The substrate is preferably of the silicon on insulator (SOI) type.Type: ApplicationFiled: November 3, 2015Publication date: February 25, 2016Applicant: STMICROELECTRONICS, INC.Inventors: Walter Kleemeier, John Hongguang Zhang
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Patent number: 9240454Abstract: An integrated circuit includes a substrate supporting a transistor having a source region and a drain region. A high dopant concentration delta-doped layer is present on the source region and drain region of the transistor. A set of contacts extend through a pre-metal dielectric layer covering the transistor. A silicide region is provided at a bottom of the set of contacts. The silicide region is formed by a salicidation reaction between a metal present at the bottom of the contact and the high dopant concentration delta-doped layer on the source region and drain region of the transistor.Type: GrantFiled: October 22, 2014Date of Patent: January 19, 2016Assignee: STMicroelectronics, Inc.Inventors: Qing Liu, Walter Kleemeier
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Publication number: 20150357477Abstract: An integrated circuit transistor is formed on and in a substrate. A trench in the substrate is at least partially filed with a metal material to form a source (or drain) contact buried in the substrate. The substrate further includes a source (or drain) region epitaxially grown above the source (or drain) contact. The substrate further includes a channel region adjacent to the source (or drain) region. A gate dielectric is provided on top of the channel region and a gate electrode is provided on top of the gate dielectric. The substrate is preferably of the silicon on insulator (SOI) type.Type: ApplicationFiled: June 6, 2014Publication date: December 10, 2015Applicant: STMicroelectronics, Inc.Inventors: John Hongguang Zhang, Walter Kleemeier
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Patent number: 9209305Abstract: An integrated circuit transistor is formed on and in a substrate. A trench in the substrate is at least partially filed with a metal material to form a source (or drain) contact buried in the substrate. The substrate further includes a source (or drain) region epitaxially grown above the source (or drain) contact. The substrate further includes a channel region adjacent to the source (or drain) region. A gate dielectric is provided on top of the channel region and a gate electrode is provided on top of the gate dielectric. The substrate is preferably of the silicon on insulator (SOI) type.Type: GrantFiled: June 6, 2014Date of Patent: December 8, 2015Assignee: STMicroelectronics, Inc.Inventors: John Hongguang Zhang, Walter Kleemeier
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Patent number: 8987780Abstract: A graphene capped HEMT device and a method of fabricating same are disclosed. The graphene capped HEMT device includes one or more graphene caps that enhance device performance and/or reliability of an exemplary AlGaN/GaN heterostructure transistor used in high-frequency, high-energy applications, e.g., wireless telecommunications. The HEMT device disclosed makes use of the extraordinary material properties of graphene. One of the graphene caps acts as a heat sink underneath the transistor, while the other graphene cap stabilizes the source, drain, and gate regions of the transistor to prevent cracking during high-power operation. A process flow is disclosed for replacing a three-layer film stack, previously used to prevent cracking, with a one-atom thick layer of graphene, without otherwise degrading device performance. In addition, the HEMT device disclosed includes a hexagonal boron nitride adhesion layer to facilitate deposition of the compound nitride semiconductors onto the graphene.Type: GrantFiled: May 31, 2013Date of Patent: March 24, 2015Assignee: STMicroelectronics, Inc.Inventors: John H Zhang, Cindy Goldberg, Walter Kleemeier
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Publication number: 20140353722Abstract: A graphene capped HEMT device and a method of fabricating same are disclosed. The graphene capped HEMT device includes one or more graphene caps that enhance device performance and/or reliability of an exemplary AlGaN/GaN heterostructure transistor used in high-frequency, high-energy applications, e.g., wireless telecommunications. The HEMT device disclosed makes use of the extraordinary material properties of graphene. One of the graphene caps acts as a heat sink underneath the transistor, while the other graphene cap stabilizes the source, drain, and gate regions of the transistor to prevent cracking during high-power operation. A process flow is disclosed for replacing a three-layer film stack, previously used to prevent cracking, with a one-atom thick layer of graphene, without otherwise degrading device performance. In addition, the HEMT device disclosed includes a hexagonal boron nitride adhesion layer to facilitate deposition of the compound nitride semiconductors onto the graphene.Type: ApplicationFiled: May 31, 2013Publication date: December 4, 2014Inventors: John H. Zhang, Cindy Goldberg, Walter Kleemeier