Patents by Inventor Walter Kogler

Walter Kogler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam device with retarding field analyzer
    Patent number: 8203119
    Abstract: The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube voltage; and a retarding field analyzer in the vicinity of the beam tube element to detect secondary charged particles generated by the primary charged particle beam on the specimen. According to the invention, the retarding field analyzer thereby comprises an entrance grid electrode at a second voltage; at least one filter grid electrode at a first voltage; a charged particle detector to detect the secondary charged particles; and at least one further electrode element arranged between the entrance grid electrode and the at least one filter grid electrode. The at least one further electrode element reduces the size of the stray fields regions in the retarding electric field region to improve the energy resolution of the retarding field analyzer.
    Type: Grant
    Filed: June 10, 2005
    Date of Patent: June 19, 2012
    Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventors: Ralf Degenhardt, Hans-Peter Feuerbaum, Dirk Hambach, Walter Kögler, Harry Munack, Carlo Salvesen
  • Charged Particle Beam Device With Retarding Field Analyzer
    Publication number: 20090200463
    Abstract: The invention provides a charged particle beam device to inspect or structure a specimen with a primary charged particle beam propagating along an optical axis; a beam tube element having a tube voltage; and a retarding field analyzer in the vicinity of the beam tube element to detect secondary charged particles generated by the primary charged particle beam on the specimen. According to the invention, the retarding field analyzer thereby comprises an entrance grid electrode at a second voltage; at least one filter grid electrode at a first voltage; a charged particle detector to detect the secondary charged particles; and at least one further electrode element arranged between the entrance grid electrode and the at least one filter grid electrode. The at least one further electrode element reduces the size of the stray fields regions in the retarding electric field region to improve the energy resolution of the retarding field analyzer.
    Type: Application
    Filed: June 10, 2005
    Publication date: August 13, 2009
    Inventors: Ralf Degenhardt, Hans-Peter Feuerbaum, Dirk Hambach, Walter Kögler, Harry Munack, Carlo Salvesen
  • Method and device for manufacturing of saddle coils
    Publication number: 20030131467
    Abstract: The invention provides a method of manufacturing a saddle coil. The method comprises the step of winding a conductor around a winding core (12) which is at least partially inclined. During this step an intermediate coil is formed. The intermediate coil is bent to form the saddle coil.
    Type: Application
    Filed: November 5, 2002
    Publication date: July 17, 2003
    Inventors: Walter Kogler, Harry Munack