Patents by Inventor Walter Matthias Clauss

Walter Matthias Clauss has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Shielded probe systems with controlled testing environments
    Patent number: 10281492
    Abstract: Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting assembly extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting assembly includes an electrically conductive support surface, which is configured to support a substrate that includes the DUT. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting assembly.
    Type: Grant
    Filed: October 5, 2017
    Date of Patent: May 7, 2019
    Assignee: FormFactor Beaverton, Inc.
    Inventors: Michael Teich, Karsten Stoll, Walter Matthias Clauss, Swen Schmiedchen
  • SHIELDED PROBE SYSTEMS WITH CONTROLLED TESTING ENVIRONMENTS
    Publication number: 20180031608
    Abstract: Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting assembly extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting assembly includes an electrically conductive support surface, which is configured to support a substrate that includes the DUT. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting assembly.
    Type: Application
    Filed: October 5, 2017
    Publication date: February 1, 2018
    Inventors: Michael Teich, Karsten Stoll, Walter Matthias Clauss, Swen Schmiedchen
  • SHIELDED PROBE SYSTEMS WITH CONTROLLED TESTING ENVIRONMENTS
    Publication number: 20170292974
    Abstract: Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting stack extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting stack includes an electrically conductive support surface and a temperature-controlled chuck. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting stack.
    Type: Application
    Filed: April 8, 2016
    Publication date: October 12, 2017
    Inventors: Michael Teich, Karsten Stoll, Walter Matthias Clauss, Swen Schmiedchen
  • Shielded probe systems with controlled testing environments
    Patent number: 9784763
    Abstract: Shielded probe systems are disclosed herein. The shielded probe systems are configured to test a device under test (DUT) and include an enclosure that defines an enclosure volume, a translation stage with a stage surface, a substrate-supporting stack extending from the stage surface, an electrically conductive shielding structure, an isolation structure, and a thermal shielding structure. The substrate-supporting stack includes an electrically conductive support surface and a temperature-controlled chuck. The electrically conductive shielding structure defines a shielded volume. The isolation structure electrically isolates the electrically conductive shielding structure from the enclosure and from the translation stage. The thermal shielding structure extends within the enclosure volume and at least partially between the enclosure and the substrate-supporting stack.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: October 10, 2017
    Assignee: Cascade Microtech, Inc.
    Inventors: Michael Teich, Karsten Stoll, Walter Matthias Clauss, Swen Schmiedchen