Abstract: An electronic imaging device includes a base layer containing electrical functional circuitry, the base layer having a first side for interconnection of the circuitry and a second side which serves as a photo-detection side. The second side has exposed photosensitive electrical elements arranged in the base layer. Spacers of a predetermined height are provided adjacent to said second side. The spacers can advantageously be used for gaining control over the tolerance of a desired distance between a lens of a lens system and said photo-detection side. Thus, individual focusing of the lens system of each imager device after completion of production is no longer needed. Moreover, an air gap that improves the performance of the micro-lenses may be formed.

Abstract: The invention relates to a method of manufacturing a semiconductor device, comprising the provision of a substrate (1) having a dielectric layer (2) on this substrate (1), a conductive layer (3) on the dielectric layer (2), an inorganic anti-reflection coating (4) on the conductive layer (3), and a resist mask (6) on the inorganic anti-reflection coating (4). The method further comprises the following steps: patterning the inorganic anti-reflection coating (4) by means of the resist mask (6), patterning the conductive layer (3) by etching down to the dielectric layer (2), removing the resist mask (6), and removing the inorganic anti-reflection coating (4). According to the invention, the inorganic anti-reflection coating (4) is removed by means of a dry etch, using a polymerizing gas. It is achieved by this that no or hardly any changes in the critical dimension will occur.

Abstract: The invention relates to a method of manufacturing a semiconductor device, comprising the provision of a substrate (1) having a dielectric layer (2) on this substrate (1), a conductive layer (3) on the dielectric layer (2), an inorganic anti-reflection coating (4) on the conductive layer (3), and a resist mask (6) on the inorganic anti-reflection coating (4).