Patents by Inventor Wan-Jung Wu

Wan-Jung Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240120236
    Abstract: A method includes etching a gate stack in a wafer to form a trench, depositing a silicon nitride liner extending into the trench, and depositing a silicon oxide layer. The process of depositing the silicon oxide layer includes performing a treatment process on the wafer using a process gas including nitrogen and hydrogen, and performing a soaking process on the wafer using a silicon precursor.
    Type: Application
    Filed: April 25, 2023
    Publication date: April 11, 2024
    Inventors: Tai-Jung Kuo, Po-Cheng Shih, Wan Chen Hsieh, Zhen-Cheng Wu, Chia-Hui Lin, Tze-Liang Lee
  • Patent number: D525894
    Type: Grant
    Filed: September 14, 2005
    Date of Patent: August 1, 2006
    Assignee: Longsun Technologies Co., Ltd.
    Inventors: Liang-Chieh Chiang, Pei-Chun Ko, Wan-Jung Wu, Wen-Shou Wang, Yu-Pin Kao, Jack C. Chu