Abstract: The present invention relates to a FOUP loading apparatus capable of implementing a stable horizontal and locking state when a FOUP is loaded and transferred by implementing a stable locking state of a locker on a stage of a FOUP opener and preventing ant interference when the FOUP is positioned. The FOUP loading apparatus for a FOUP opener includes a stage moved on a support base frame, a stage driving unit for forwardly and backwardly moving the stage along a set way, a locker locked on the stage for engaging the FOUP, and a locker driving unit for driving the locker. In the FOUP loading apparatus, a stable locking operation is implemented on a stage, and a stable positioning operation of the FOUP is obtained, so that it is possible to implement a stable FOUP positioning and loading operation from the positioning process to the transferring process.

Abstract: An apparatus for transferring a front opener unified pod (FOUP) door for a FOUP opener, in which a protection cover is provided to prevent an inflow of particles through a belt when a separated FOUP door moves up and down, or a lifter having an improved structure employing a ball screw mode and a door holder slider which is driven by a rack/pinion gear operated by a driving motor mounted thereon are provided.

Abstract: The present invention relates to a FOUP loading apparatus capable of implementing a stable horizontal and locking state when a FOUP is loaded and transferred by implementing a stable locking state of a locker on a stage of a FOUP opener and preventing ant interference when the FOUP is positioned. The FOUP loading apparatus for a FOUP opener includes a stage moved on a support base frame, a stage driving unit for forwardly and backwardly moving the stage along a set way, a locker locked on the stage for engaging the FOUP, and a locker driving unit for driving the locker. In the FOUP loading apparatus, a stable locking operation is implemented on a stage, and a stable positioning operation of the FOUP is obtained, so that it is possible to implement a stable FOUP positioning and loading operation from the positioning process to the transferring process.

Abstract: The present invention relates to a FOUP door opening apparatus capable of stably supporting a FOUP door, implementing a smooth door locking and unlocking operation and preventing a particle from being introduced into the system when opening a FOUP door. The FOUP door opening apparatus includes a door opening unit having a front end having a latch key and a rear end having a worm wheel wherein the work wheel is engaged with a worm, and the worm is connected with a driving motor shaft, a particle discharging unit which has a suction hole at a certain portion wherein the suction hole is connected with a suction and discharging unit having a certain pressure for thereby sucking and discharging the particles to the outside when opening the door, and a door support unit which includes buffering rollers installed at both ends of the latch key for enhancing a contact feel and implementing a door support based on an expansion force of the compressed air before the FOUP door is opened.