Abstract: A capacitive motion sensor includes a primary plate including a primary pattern replicated periodically, a secondary plate including a plurality of pattern regions with an insulated region inserted there between, wherein each of the pattern regions has a secondary pattern replicated periodically, a signal source for sending a plate input signal to the primary plate, and a displacement measuring unit for receiving a plurality of plate output signals from the secondary plate to measure a displacement of a moving one of the plates with respect to the other one of the plates. The primary plate is arranged in parallel with the secondary plate in such a manner that the primary pattern is confronted with the secondary pattern and the pattern regions of the secondary plate are arranged in a two-dimensional array.

Abstract: A capacitive motion sensor includes a primary plate including a primary pattern replicated periodically, a secondary plate including a plurality of pattern regions with an insulated region inserted therebetween, wherein each of the pattern regions has a secondary pattern replicated periodically, a signal source for sending a plate input signal to the primary plate, and a displacement measuring unit for receiving a plurality of plate output signals from the secondary plate to measure a displacement of a moving one of the plates with respect to the other one of the plates.