Patents by Inventor Wan-Te CHEN

Wan-Te CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12451430
    Abstract: A method of manufacturing a semiconductor device based on a dual-architecture-compatible design includes: forming transistor components of in a transistor (TR) layer; and performing one of fabricating additional components according to (A) a buried power rail (BPR) type of architecture or (B) a non-buried power rail (non-BPR) type of architecture. The step (A) includes, in corresponding sub-TR layers, forming various non-dummy sub-TR structures, and, in corresponding supra-TR layers, forming various dummy supra-TR structures which are corresponding first artifacts. The step (B) includes, in corresponding supra-TR layers, forming various non-dummy supra-TR structures and forming various dummy supra-TR structures which are corresponding second artifacts, the first and second artifacts resulting from the dual-architecture-compatible design being suitable to adaptation into the BPR type of architecture.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: October 21, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Hui Chen, Cheng-Hsiang Hsieh, Wan-Te Chen, Tzu Ching Chang, Wei Chih Chen, Ruey-Bin Sheen, Chin-Ming Fu
  • Patent number: 12408426
    Abstract: An integrated circuit (IC) including a plurality of finfet cells designed with digital circuit design rules to provide smaller finfet cells with decreased cell heights, and analog circuit cell structures including first finfet cells of the plurality of finfet cells and including at least one cut metal layer. The smaller finfet cells with decreased cell heights provide a first shorter metal track in one direction and the at least one cut metal layer provides a second shorter metal track in another direction to increase maximum electromigration currents in the integrated circuit.
    Type: Grant
    Filed: December 3, 2021
    Date of Patent: September 2, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Hui Chen, Tzu-Ching Chang, Weichih Chen, Wan-Te Chen, Tsung-Hsin Yu, Cheng-Hsiang Hsieh
  • Publication number: 20250031443
    Abstract: An integrated circuit (IC) including a plurality of finfet cells designed with digital circuit design rules to provide smaller finfet cells with decreased cell heights, and analog circuit cell structures including first finfet cells of the plurality of finfet cells and including at least one cut metal layer. The smaller finfet cells with decreased cell heights provide a first shorter metal track in one direction and the at least one cut metal layer provides a second shorter metal track in another direction to increase maximum electromigration currents in the integrated circuit.
    Type: Application
    Filed: July 26, 2024
    Publication date: January 23, 2025
    Inventors: Chung-Hui Chen, Tzu-Ching Chang, Weichih Chen, Wan-Te Chen, Tsung-Hsin Yu, Cheng-Hsiang Hsieh
  • Publication number: 20240395714
    Abstract: A semiconductor device includes in a transistor layer, components of corresponding transistors (transistor components); in corresponding layers below the transistor layer (sub-TR layers), various non-dummy structures (non-dummy sub-TR structures) coupled to the transistor components and which are included because the semiconductor device has a buried power rail (BPR) architecture; and in corresponding layers over the transistor layer (supra-TR layers), various dummy structures (dummy supra-TR structures) which are included as artifacts resulting from the semiconductor device being based on a dual-architecture-compatible design which is substantially equally suitable either to adaptation into a non-BPR architecture or adaptation into the BPR architecture; and the semiconductor device being an inductor.
    Type: Application
    Filed: July 30, 2024
    Publication date: November 28, 2024
    Inventors: Chung-Hui CHEN, Cheng-Hsiang HSIEH, Wan-Te CHEN, Tzu-Ching CHANG, Wei-Chih CHEN, Ruey-Bin SHEEN, Chin-Ming FU
  • Publication number: 20240394455
    Abstract: A semiconductor device includes an active area structure extending in a first direction; gate structures over the active area structure and extending in a second direction, the gate structures including a first gate structure and a second gate structure; contact-source/drain (CSD) conductors over the active area structure, interleaved with corresponding ones of the gate structures, and extending in the second direction; via-on-gate (VG) structures, the VG structures including a first VG structure over the first gate structure and a second VG structure over the second gate structure; and first conductive segments in a first layer of metallization (M_1st layer) over the active area structure and extending in the first direction, the first conductive segments including a first gate-signal-carrying (GSC) conductor which overlaps the active area structure, extends over the first and second VG structures, and is electrically coupled in common with each of the first and second gate structures.
    Type: Application
    Filed: July 30, 2024
    Publication date: November 28, 2024
    Inventors: Chung-Hui CHEN, Tzu Ching CHANG, Wan-Te CHEN
  • Publication number: 20240387518
    Abstract: A semiconductor device includes a substrate. A first nanosheet structure and a second nanosheet structure are disposed on the substrate. Each of the first and second nanosheet structures have at least one nanosheet forming source/drain regions and a gate structure including a conductive gate contact. A first oxide structure is disposed on the substrate between the first and second nanosheet structures. A conductive terminal is disposed in or on the first oxide structure. The conductive terminal, the first oxide structure and the gate structure of the first nanosheet structure define a capacitor.
    Type: Application
    Filed: July 29, 2024
    Publication date: November 21, 2024
    Inventors: Chung-Hui Chen, Wan-Te Chen, Shu-Wei Chung, Tung-Heng Hsieh, Tzu-Ching Chang, Tsung-Hsin Yu, Yung Feng Chang
  • Publication number: 20240363614
    Abstract: Methods and semiconductor devices are described herein which eliminate the use of additional masks. A first interconnect layer is formed. A first resistive layer is formed on top of the first interconnect layer. A dielectric layer is formed on top of the first resistive layer. A second resistive layer is formed on top of the dielectric layer.
    Type: Application
    Filed: July 9, 2024
    Publication date: October 31, 2024
    Inventors: Chung-Hui Chen, Wan-Te Chen, Cheng-Hsiang Hsieh, Chia-Tien Wu
  • Patent number: 12094872
    Abstract: A semiconductor device includes a substrate. A first nanosheet structure and a second nanosheet structure are disposed on the substrate. Each of the first and second nanosheet structures have at least one nanosheet forming source/drain regions and a gate structure including a conductive gate contact. A first oxide structure is disposed on the substrate between the first and second nanosheet structures. A conductive terminal is disposed in or on the first oxide structure. The conductive terminal, the first oxide structure and the gate structure of the first nanosheet structure define a capacitor.
    Type: Grant
    Filed: December 10, 2021
    Date of Patent: September 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Hui Chen, Wan-Te Chen, Shu-Wei Chung, Tung-Heng Hsieh, Tzu-Ching Chang, Tsung-Hsin Yu, Yung Feng Chang
  • Patent number: 12093627
    Abstract: A method (of forming a semiconductor device) includes: forming an active area structure extending in a first direction; forming gate structures over the active area structure and extending in a second direction substantially perpendicular to the first direction; forming contact-source/drain (CSD) conductors over the active area structure, interleaved with corresponding ones of the gate structures, and extending in the second direction; and forming first conductive segments in a first layer of metallization (M_1st layer) over the active area structure and extending in the first direction, the first conductive segments including a first gate-signal-carrying (GSC) conductor which overlaps the active area structure.
    Type: Grant
    Filed: November 8, 2022
    Date of Patent: September 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Hui Chen, Tzu Ching Chang, Wan-Te Chen
  • Patent number: 12062652
    Abstract: Methods and semiconductor devices are described herein which eliminate the use of additional masks. A first interconnect layer is formed. A first resistive layer is formed on top of the first interconnect layer. A dielectric layer is formed on top of the first resistive layer. A second resistive layer is formed on top of the dielectric layer.
    Type: Grant
    Filed: January 12, 2023
    Date of Patent: August 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Chung-Hui Chen, Wan-Te Chen, Cheng-Hsiang Hsieh, Chia-Tien Wu
  • Publication number: 20240258305
    Abstract: A semiconductor device and method of manufacturing the same are provided. The semiconductor device includes a first active region extending along a first direction. The semiconductor device also includes a second active region extending along the first direction. The semiconductor device further includes a first gate extending along a second direction perpendicular to the first direction. The first gate has a first segment disposed between the first active region and the second active region. In addition, the semiconductor device includes a first electrical conductor extending along the second direction and across the first active region and the second active region, wherein the first segment of the first gate and the first electrical conductor are partially overlapped to form a first capacitor.
    Type: Application
    Filed: April 11, 2024
    Publication date: August 1, 2024
    Inventors: CHUNG-HUI CHEN, WAN-TE CHEN, TZU CHING CHANG, TSUNG-HSIN YU
  • Patent number: 12040178
    Abstract: A semiconductor device structure and method for manufacturing the same are provided. The method includes forming a first resistive element over a substrate, and the first resistive element has a first sidewall extending in a first direction and a second sidewall opposite to the first sidewall and extending in the first direction. The method further includes forming a first conductive feature and a second conductive feature over and electrically connected to the first resistive element and forming a second resistive element over the first resistive element and spaced apart from the first resistive element in a second direction. In addition, the second resistive element is located between the first sidewall and the second sidewall of the first resistive element in a top view, and the first resistive element and the second resistive element are made of different nitrogen-containing materials.
    Type: Grant
    Filed: April 26, 2023
    Date of Patent: July 16, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsiu-Wen Hsueh, Yu-Hsiang Chen, Wen-Sheh Huang, Chii-Ping Chen, Wan-Te Chen
  • Patent number: 11984444
    Abstract: A semiconductor device and method of manufacturing the same are provided. The semiconductor device includes a first active region extending along a first direction. The semiconductor device also includes a second active region extending along the first direction. The semiconductor device further includes a first gate extending along a second direction perpendicular to the first direction. The first gate has a first segment disposed between the first active region and the second active region. In addition, the semiconductor device includes a first electrical conductor extending along the second direction and across the first active region and the second active region, wherein the first segment of the first gate and the first electrical conductor are partially overlapped to form a first capacitor.
    Type: Grant
    Filed: June 24, 2021
    Date of Patent: May 14, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chung-Hui Chen, Wan-Te Chen, Tzu Ching Chang, Tsung-Hsin Yu
  • Patent number: 11901289
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate and a resistive element over the substrate. The semiconductor device structure also includes a thermal conductive element over the substrate. A direct projection of the thermal conductive element on a main surface of the resistive element extends across a portion of a first imaginary line and a portion of a second imaginary line of the main surface. The first imaginary line is perpendicular to the second imaginary line, and the first imaginary line and the second imaginary line intersect at a center of the main surface.
    Type: Grant
    Filed: June 23, 2022
    Date of Patent: February 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wan-Te Chen, Chung-Hui Chen, Wei-Chih Chen, Chii-Ping Chen, Wen-Sheh Huang, Bi-Ling Lin, Sheng-Feng Liu
  • Patent number: 11901283
    Abstract: An integrated circuit (IC) structure includes a semiconductor substrate, a bottom electrode routing, a capacitor structure, a top electrode routing. The bottom electrode routing is over the semiconductor substrate. The capacitor structure is over the bottom electrode routing. The capacitor structure includes a bottom metal layer, a middle metal layer above the bottom metal layer, and a top metal layer above the middle metal layer. When viewed in a plan view, the top metal layer has opposite straight edges extending along a first direction and opposite square wave-shaped edges connecting the opposite straight edges, the square wave-shaped edges each comprise alternating first and second segments extending along a second direction perpendicular to the first direction, and third segments each connecting adjacent two of the first and second segments, wherein the third segments extend along the first direction.
    Type: Grant
    Filed: July 9, 2021
    Date of Patent: February 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wan-Te Chen, Chung-Hui Chen, Wei Chih Chen
  • Publication number: 20240014124
    Abstract: An integrated circuit (IC) structure includes a semiconductor substrate, a bottom electrode routing, a capacitor structure, a top electrode routing. The bottom electrode routing is over the semiconductor substrate. The capacitor structure is over the bottom electrode routing. The capacitor structure includes a bottom metal layer, a middle metal layer above the bottom metal layer, and a top metal layer above the middle metal layer. When viewed in a plan view, the top metal layer has opposite straight edges extending along a first direction and opposite square wave-shaped edges connecting the opposite straight edges, the square wave-shaped edges each comprise alternating first and second segments extending along a second direction perpendicular to the first direction, and third segments each connecting adjacent two of the first and second segments, wherein the third segments extend along the first direction.
    Type: Application
    Filed: September 22, 2023
    Publication date: January 11, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Wan-Te CHEN, Chung-Hui CHEN, Wei Chih CHEN
  • Publication number: 20230268176
    Abstract: A semiconductor device structure and method for manufacturing the same are provided. The method includes forming a first resistive element over a substrate, and the first resistive element has a first sidewall extending in a first direction and a second sidewall opposite to the first sidewall and extending in the first direction. The method further includes forming a first conductive feature and a second conductive feature over and electrically connected to the first resistive element and forming a second resistive element over the first resistive element and spaced apart from the first resistive element in a second direction. In addition, the second resistive element is located between the first sidewall and the second sidewall of the first resistive element in a top view, and the first resistive element and the second resistive element are made of different nitrogen-containing materials.
    Type: Application
    Filed: April 26, 2023
    Publication date: August 24, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsiu-Wen HSUEH, Yu-Hsiang CHEN, Wen-Sheh HUANG, Chii-Ping CHEN, Wan-Te CHEN
  • Patent number: 11670501
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate, a first resistive element and a second resistive element over the semiconductor substrate. A topmost surface of the second resistive element is higher than a topmost surface of the first resistive element. The semiconductor device structure also includes a first conductive feature and a second conductive feature electrically connected to the first resistive element. The second resistive element is between and electrically isolated from the first conductive feature and the second conductive feature. The semiconductor device structure further includes a first dielectric layer surrounding the first conductive feature and the second conductive feature.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: June 6, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsiu-Wen Hsueh, Yu-Hsiang Chen, Wen-Sheh Huang, Chii-Ping Chen, Wan-Te Chen
  • Publication number: 20230170343
    Abstract: Methods and semiconductor devices are described herein which eliminate the use of additional masks. A first interconnect layer is formed. A first resistive layer is formed on top of the first interconnect layer. A dielectric layer is formed on top of the first resistive layer. A second resistive layer is formed on top of the dielectric layer.
    Type: Application
    Filed: January 12, 2023
    Publication date: June 1, 2023
    Inventors: Chung-Hui Chen, Wan-Te Chen, Cheng-Hsiang Hsieh, Chia-Tien Wu
  • Publication number: 20230062400
    Abstract: A method (of forming a semiconductor device) includes: forming an active area structure extending in a first direction; forming gate structures over the active area structure and extending in a second direction substantially perpendicular to the first direction; forming contact-source/drain (CSD) conductors over the active area structure, interleaved with corresponding ones of the gate structures, and extending in the second direction; and forming first conductive segments in a first layer of metallization (M_lst layer) over the active area structure and extending in the first direction, the first conductive segments including a first gate-signal-carrying (GSC) conductor which overlaps the active area structure.
    Type: Application
    Filed: November 8, 2022
    Publication date: March 2, 2023
    Inventors: Chung-Hui CHEN, Tzu Ching CHANG, Wan-Te CHEN