Patents by Inventor Wan Yee Cheung

Wan Yee Cheung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transistor fabrication method
    Patent number: 5891784
    Abstract: A method of forming low stack height transistors having controllable linewidth in an integrated circuit without channeling is disclosed. A disposable hardmask of doped glass is utilized to define the gate and subsequently protect the gate (and the underlying substrate) during ion implantation which forms the source and drains. An anti-reflective coating helps protect against reflective gate notching. A variety of silicided and non-silicided) structures may be formed.
    Type: Grant
    Filed: April 27, 1995
    Date of Patent: April 6, 1999
    Assignee: Lucent Technologies, Inc.
    Inventors: Wan Yee Cheung, Sailesh Chittipeddi, Chong-Cheng Fu, Taeho Kook, Avinoam Kornblit, Steven Alan Lytle, Kurt George Steiner, Tungsheng Yang