Patents by Inventor Wang-Hua Lin

Wang-Hua Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11823945
    Abstract: A method for cleaning a semiconductor wafer is provided. The method includes placing a semiconductor wafer over a supporter arranged around a central axis of a spin base. The method further includes securing the semiconductor wafer using a clamping member positioned on the supporter. The movement of the semiconductor wafer during the placement of the semiconductor wafer over the supporter is guided by a guiding member located over the clamping member. The method also includes spinning the semiconductor wafer by rotating the spin base about the central axis. In addition, the method includes dispensing a processing liquid over the semiconductor wafer.
    Type: Grant
    Filed: May 18, 2020
    Date of Patent: November 21, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Wang-Hua Lin, Chun-Liang Tai, Chun-Hsiang Fan, Ming-Hsi Yeh, Kuo-Bin Huang
  • Publication number: 20200279766
    Abstract: A method for cleaning a semiconductor wafer is provided. The method includes placing a semiconductor wafer over a supporter arranged around a central axis of a spin base. The method further includes securing the semiconductor wafer using a clamping member positioned on the supporter. The movement of the semiconductor wafer during the placement of the semiconductor wafer over the supporter is guided by a guiding member located over the clamping member. The method also includes spinning the semiconductor wafer by rotating the spin base about the central axis. In addition, the method includes dispensing a processing liquid over the semiconductor wafer.
    Type: Application
    Filed: May 18, 2020
    Publication date: September 3, 2020
    Inventors: Wang-Hua LIN, Chun-Liang TAI, Chun-Hsiang FAN, Ming-Hsi YEH, Kuo-Bin HUANG
  • Patent number: 10658221
    Abstract: A method for cleaning a semiconductor wafer is provided. The method includes placing a semiconductor wafer over a supporter arranged around a central axis of a spin base. The method further includes securing the semiconductor wafer using a clamping member positioned on the supporter. The movement of the semiconductor wafer during the placement of the semiconductor wafer over the supporter is guided by a guiding member located over the clamping member. The method also includes spinning the semiconductor wafer by rotating the spin base about the central axis. In addition, the method includes dispensing a processing liquid over the semiconductor wafer.
    Type: Grant
    Filed: November 14, 2017
    Date of Patent: May 19, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wang-Hua Lin, Chun-Liang Tai, Chun-Hsiang Fan, Ming-Hsi Yeh, Kuo-Bin Huang
  • Publication number: 20190148212
    Abstract: A method for cleaning a semiconductor wafer is provided. The method includes placing a semiconductor wafer over a supporter arranged around a central axis of a spin base. The method further includes securing the semiconductor wafer using a clamping member positioned on the supporter. The movement of the semiconductor wafer during the placement of the semiconductor wafer over the supporter is guided by a guiding member located over the clamping member. The method also includes spinning the semiconductor wafer by rotating the spin base about the central axis. In addition, the method includes dispensing a processing liquid over the semiconductor wafer.
    Type: Application
    Filed: November 14, 2017
    Publication date: May 16, 2019
    Inventors: Wang-Hua LIN, Chun-Liang TAI, Chun-Hsiang FAN, Ming-Hsi YEH, Kuo-Bin HUANG
  • Patent number: 9018831
    Abstract: A triode-type field emission device and method of manufacturing the same, suitable for use in screen print process of curved or planar substrate, comprising the following steps: firstly, form a cathode and a gate on a cathode substrate at the same time by means of screen printing, and a gap is located between gate and cathode, to avoid short circuit or interference; next, form a hedgehog-shape field emission layer on at least said cathode; then, form a transparent conductive layer and a light emitting layer sequentially on an anode substrate; and finally, dispose cathode substrate and anode substrate in parallel and spaced apart, and package them into a triode-type field emission device. Bias of cathode and gate can be controlled to achieve local adjustment of light. Also, gate may serve as an emitter, to increase field emission efficiency and its service life.
    Type: Grant
    Filed: March 14, 2012
    Date of Patent: April 28, 2015
    Assignee: National chung Cheng University
    Inventors: Yuan-Yao Li, Meng-Jey Youh, Chun-Lung Tseng, Hung-Chih Wu, Yen-Ming Juan, Wang-Hua Lin
  • Publication number: 20130015778
    Abstract: A triode-type field emission device and method of manufacturing the same, suitable for use in screen print process of curved or planar substrate, comprising the following steps: firstly, form a cathode and a gate on a cathode substrate at the same time by means of screen printing, and a gap is located between gate and cathode, to avoid short circuit or interference; next, form a hedgehog-shape field emission layer on at least said cathode; then, form a transparent conductive layer and a light emitting layer sequentially on an anode substrate; and finally, dispose cathode substrate and anode substrate in parallel and spaced apart, and package them into a triode-type field emission device. Bias of cathode and gate can be controlled to achieve local adjustment of light. Also, gate may serve as an emitter, to increase field emission efficiency and its service life.
    Type: Application
    Filed: March 14, 2012
    Publication date: January 17, 2013
    Inventors: Yuan-Yao LI, Meng-Jey Youh, Chun-Lung Tseng, Hung-Chih Wu, Yen-Ming Juan, Wang-Hua Lin
  • Patent number: 8299699
    Abstract: A double-sided light-emitting field emission device and method of manufacturing same, said device comprising at least two transparent conductive layers, mixed field emission layers, and transparent package device. Wherein, the mixed field emission layer of field emission source and phosphor are utilized directly to serve as anode and cathode alternatively, such that on applying an AC power supply, roles of anode and cathode are changed alternatively along with frequency, hereby forming double-sided light-emitting structure. Therefore, the applications of said double-sided light-emitting field emission device are pretty wide, and having advantages of protecting field emission source, activating field emission source, reducing field emission arcing effect, having conductive phosphor, and raising illumination.
    Type: Grant
    Filed: August 15, 2011
    Date of Patent: October 30, 2012
    Assignee: National Chung Cheng University
    Inventors: Yuan-Yao Li, Meng-Jey Youh, Chun-Lung Tseng, Hung-Chih Wu, Wang-Hua Lin, Yen-Ming Juan, Sheng-Cheng Chiu
  • Publication number: 20120248967
    Abstract: A double-sided light-emitting field emission device and method of manufacturing same, said device comprising at least two transparent conductive layers, mixed field emission layers, and transparent package device. Wherein, the mixed field emission layer of field emission source and phosphor are utilized directly to serve as anode and cathode alternatively, such that on applying an AC power supply, roles of anode and cathode are changed alternatively along with frequency, hereby forming double-sided light-emitting structure. Therefore, the applications of said double-sided light-emitting field emission device are pretty wide, and having advantages of protecting field emission source, activating field emission source, reducing field emission arcing effect, having conductive phosphor, and raising illumination.
    Type: Application
    Filed: August 15, 2011
    Publication date: October 4, 2012
    Inventors: Yuan-Yao LI, Meng-Jey Youh, Chun-Lung Tseng, Hung-Chih Wu, Wang-Hua Lin, Yen-Ming Juan, Sheng-Cheng Chiu