Patents by Inventor Wang Park

Wang Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for heat treatment of semiconductor device
    Publication number: 20070122936
    Abstract: Disclosed is a heat treatment system for semiconductor devices. The heat treatment system is used in a heat treatment process for semiconductor devices, such as a crystallization process for an amorphous silicon thin film or a dopant activation process for a poly-crystalline silicon thin film formed on a surface of a glass substrate of a flat display panel including a liquid crystal display (LCD) or an organic light emitting device (OLED).
    Type: Application
    Filed: November 13, 2006
    Publication date: May 31, 2007
    Inventors: Wang Park, Jung Kim, Young Ahn, Hyoung Kim, Dong Shin