Patents by Inventor Wang Xiang

Wang Xiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12628339
    Abstract: A resistor between dummy flash structures includes a substrate. The substrate includes a resistor region and a flash region. A first dummy memory gate structure and a second dummy memory gate structure are disposed within the resistor region of the substrate. A polysilicon resistor is disposed between the first dummy memory gate structure and the second dummy memory gate structure. The polysilicon resistor contacts the first dummy memory gate structure and the second dummy memory gate structure.
    Type: Grant
    Filed: April 17, 2023
    Date of Patent: May 12, 2026
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Weichang Liu, Wang Xiang, Chia Ching Hsu, Yung-Lin Tseng, Shen-De Wang
  • Publication number: 20260096100
    Abstract: A method for forming a semiconductor device is disclosed. A substrate having a flash memory region and a logic device region is provided. At least one logic transistor is formed in the logic device region. At least one flash memory transistor is formed in the flash memory region. The at least one flash memory transistor comprises a metal select gate having two opposite sidewalls and two memory gates disposed on the two opposite sidewalls of the metal select gate.
    Type: Application
    Filed: December 10, 2025
    Publication date: April 2, 2026
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wang Xiang, CHIA CHING HSU, Shen-De Wang, Yong-Lin Tseng, WEICHANG LIU
  • Patent number: 12532476
    Abstract: A semiconductor device includes a substrate having a flash memory region and a logic device region, a logic transistor disposed in the logic device region, and a flash memory transistor disposed in the flash memory region. The flash memory transistor includes a metal select gate having two opposite sidewalls and two memory gates disposed on the two opposite sidewalls of the metal select gate.
    Type: Grant
    Filed: November 28, 2022
    Date of Patent: January 20, 2026
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wang Xiang, Chia Ching Hsu, Shen-De Wang, Yung-Lin Tseng, Weichang Liu
  • Patent number: 12156487
    Abstract: A RRAM (resistive random-access memory) device includes a bottom electrode line, a top electrode island and a resistive material. The bottom electrode line is directly on a first metal structure. The top electrode island is disposed beside the bottom electrode line. The resistive material is sandwiched by a sidewall of the bottom electrode line and a sidewall of the top electrode island. The present invention also provides a method of forming the RRAM device.
    Type: Grant
    Filed: October 19, 2023
    Date of Patent: November 26, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Wang Xiang, Shen-De Wang
  • Publication number: 20240315017
    Abstract: A resistor between dummy flash structures includes a substrate. The substrate includes a resistor region and a flash region. A first dummy memory gate structure and a second dummy memory gate structure are disposed within the resistor region of the substrate. A polysilicon resistor is disposed between the first dummy memory gate structure and the second dummy memory gate structure. The polysilicon resistor contacts the first dummy memory gate structure and the second dummy memory gate structure.
    Type: Application
    Filed: April 17, 2023
    Publication date: September 19, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: WEICHANG LIU, Wang Xiang, CHIA CHING HSU, Yung-Lin Tseng, Shen-De Wang
  • Publication number: 20240292765
    Abstract: A RRAM (resistive random-access memory) device includes a bottom electrode line directly on a first metal structure, a top electrode island disposed beside the bottom electrode line, a resistive material sandwiched by a sidewall of the bottom electrode line and a sidewall of the top electrode island, and a cap layer covering a portion of the first metal structure and under the bottom electrode line.
    Type: Application
    Filed: May 8, 2024
    Publication date: August 29, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Wang Xiang, Shen-De Wang
  • Patent number: 12010931
    Abstract: A RRAM (resistive random-access memory) device includes a bottom electrode line, a top electrode island and a resistive material. The bottom electrode line is directly on a first metal structure. The top electrode island is disposed beside the bottom electrode line. The resistive material is sandwiched by a sidewall of the bottom electrode line and a sidewall of the top electrode island. The present invention also provides a method of forming said RRAM device.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: June 11, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Wang Xiang, Shen-De Wang
  • Publication number: 20240155843
    Abstract: A semiconductor device includes a substrate having a flash memory region and a logic device region, a logic transistor disposed in the logic device region, and a flash memory transistor disposed in the flash memory region. The flash memory transistor includes a metal select gate having two opposite sidewalls and two memory gates disposed on the two opposite sidewalls of the metal select gate.
    Type: Application
    Filed: November 28, 2022
    Publication date: May 9, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Wang Xiang, CHIA CHING HSU, Shen-De Wang, Yung-Lin Tseng, WEICHANG LIU
  • Publication number: 20240057488
    Abstract: A RRAM (resistive random-access memory) device includes a bottom electrode line, a top electrode island and a resistive material. The bottom electrode line is directly on a first metal structure. The top electrode island is disposed beside the bottom electrode line. The resistive material is sandwiched by a sidewall of the bottom electrode line and a sidewall of the top electrode island. The present invention also provides a method of forming the RRAM device.
    Type: Application
    Filed: October 19, 2023
    Publication date: February 15, 2024
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Wang Xiang, Shen-De Wang
  • Patent number: 11444095
    Abstract: A semiconductor device with integrated memory devices and metal-oxide-semiconductor (MOS) devices, including a substrate with a first area and a second area, multiple double-diffused metal-oxide-semiconductor (DMOS) devices on the first area, wherein the double-diffused metal-oxide-semiconductor (DMOS) device includes a field oxide on the substrate, a first gate dielectric layer adjacent to the field oxide, and a first polysilicon gate on the field oxide and the first gate dielectric layer, and multiple memory units on the second area, wherein the memory unit includes an oxide-nitride-oxide (ONO) tri-layer and a second polysilicon gate on the oxide-nitride-oxide (ONO) tri-layer, wherein a top surface of the second polysilicon gate of the memory unit in the second area and a top surface of the first polysilicon gate of the double-diffused metal-oxide-semiconductor (DMOS) in the first area are on the same level.
    Type: Grant
    Filed: April 13, 2021
    Date of Patent: September 13, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wang Xiang, Chia-Ching Hsu, Shen-De Wang, Weichang Liu
  • Publication number: 20220246845
    Abstract: A RRAM (resistive random-access memory) device includes a bottom electrode line, a top electrode island and a resistive material. The bottom electrode line is directly on a first metal structure. The top electrode island is disposed beside the bottom electrode line. The resistive material is sandwiched by a sidewall of the bottom electrode line and a sidewall of the top electrode island. The present invention also provides a method of forming said RRAM device.
    Type: Application
    Filed: March 9, 2021
    Publication date: August 4, 2022
    Inventors: Chia-Ching Hsu, Wang Xiang, Shen-De Wang
  • Patent number: 11387337
    Abstract: A memory device includes a main cell on a substrate, a first reference cell adjacent to one side of the main cell, and a second reference cell adjacent to another side of the main cell. Preferably, the main cell includes a first gate electrode on the substrate, a second gate electrode on one side of the first gate electrode and covering a top surface of the first gate electrode, a first charge trapping layer between the first gate electrode and the second gate electrode and including a first oxide-nitride-oxide (ONO) layer, a third gate electrode on another side of the first gate electrode and covering the top surface of the first gate electrode, and a second charge trapping layer between the first gate electrode and the third gate electrode and including a second ONO layer.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: July 12, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Sung Huang, Shen-De Wang, Chia-Ching Hsu, Wang Xiang
  • Patent number: 11127752
    Abstract: A semiconductor device includes a substrate, having cell region and high-voltage region. A memory cell is on the substrate within the cell region. The memory cell includes a memory gate structure and a selection gate structure on the substrate. A first spacer is sandwiched between or respectively on sidewalls of the memory cell structure and the selection gate structure. First high-voltage transistor is on the substrate within the high-voltage region. A first composite gate structure of the first high-voltage transistor includes a first gate structure on the substrate, an insulating layer with a predetermined thickness on the substrate in a -like structure or an L-like structure at cross-section, and a second gate structure on the insulating layer along the -like structure or the L-like structure. The selection gate structure and the second gate structure are originated from a same preliminary conductive layer.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: September 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Ching Hsu, Wang Xiang, Shen-De Wang, Chun-Sung Huang
  • Publication number: 20210265376
    Abstract: A semiconductor device includes a substrate, having cell region and high-voltage region. A memory cell is on the substrate within the cell region. The memory cell includes a memory gate structure and a selection gate structure on the substrate. A first spacer is sandwiched between or respectively on sidewalls of the memory cell structure and the selection gate structure. First high-voltage transistor is on the substrate within the high-voltage region. A first composite gate structure of the first high-voltage transistor includes a first gate structure on the substrate, an insulating layer with a predetermined thickness on the substrate in a -like structure or an L-like structure at cross-section, and a second gate structure on the insulating layer along the -like structure or the L-like structure. The selection gate structure and the second gate structure are originated from a same preliminary conductive layer.
    Type: Application
    Filed: February 21, 2020
    Publication date: August 26, 2021
    Applicant: United Microelectronics Corp.
    Inventors: CHIA-CHING HSU, Wang Xiang, Shen-De Wang, Chun-Sung Huang
  • Publication number: 20210233924
    Abstract: A semiconductor device with integrated memory devices and metal-oxide-semiconductor (MOS) devices, including a substrate with a first area and a second area, multiple double-diffused metal-oxide-semiconductor (DMOS) devices on the first area, wherein the double-diffused metal-oxide-semiconductor (DMOS) device includes a field oxide on the substrate, a first gate dielectric layer adjacent to the field oxide, and a first polysilicon gate on the field oxide and the first gate dielectric layer, and multiple memory units on the second area, wherein the memory unit includes an oxide-nitride-oxide (ONO) tri-layer and a second polysilicon gate on the oxide-nitride-oxide (ONO) tri-layer, wherein a top surface of the second polysilicon gate of the memory unit in the second area and a top surface of the first polysilicon gate of the double-diffused metal-oxide-semiconductor (DMOS) in the first area are on the same level.
    Type: Application
    Filed: April 13, 2021
    Publication date: July 29, 2021
    Inventors: Wang Xiang, Chia-Ching Hsu, Shen-De Wang, Weichang Liu
  • Patent number: 11011535
    Abstract: A method of integrating memory and metal-oxide-semiconductor (MOS) processes is provided, including steps of forming an oxide layer and a nitride layer on a substrate, forming a field oxide in a first area by an oxidation process with the nitride layer as a mask, wherein the oxidation process simultaneously forms a top oxide layer on the nitride layer, removing the top oxide layer, the nitride layer and the oxide layer in the first area, forming a polysilicon layer on the substrate, and patterning the polysilicon layer into MOS units in the first area and memory units in a second area.
    Type: Grant
    Filed: December 22, 2019
    Date of Patent: May 18, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wang Xiang, Chia-Ching Hsu, Shen-De Wang, Weichang Liu
  • Publication number: 20210119004
    Abstract: A memory device includes a main cell on a substrate, a first reference cell adjacent to one side of the main cell, and a second reference cell adjacent to another side of the main cell. Preferably, the main cell includes a first gate electrode on the substrate, a second gate electrode on one side of the first gate electrode and covering a top surface of the first gate electrode, a first charge trapping layer between the first gate electrode and the second gate electrode and including a first oxide-nitride-oxide (ONO) layer, a third gate electrode on another side of the first gate electrode and covering the top surface of the first gate electrode, and a second charge trapping layer between the first gate electrode and the third gate electrode and including a second ONO layer.
    Type: Application
    Filed: December 24, 2020
    Publication date: April 22, 2021
    Inventors: Chun-Sung Huang, Shen-De Wang, Chia-Ching Hsu, Wang Xiang
  • Patent number: 10916634
    Abstract: A method of fabricating a semiconductor device includes forming a memory gate and a hard mask layer on the memory gate, forming a select gate on a sidewall of the memory gate and the hard mask layer, performing a selective oxidation process to form an oxide layer on the hard mask layer and the select gate, wherein a portion of the oxide layer on the select gate is thicker than a portion of the oxide layer on the hard mask layer, and removing the oxide layer on the hard mask layer and the hard mask layer to expose a top surface of the memory gate.
    Type: Grant
    Filed: May 20, 2019
    Date of Patent: February 9, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Wei Xu, Wenbo Ding, Yu-Yang Chen, Wang Xiang
  • Patent number: 10903326
    Abstract: A method for fabricating semiconductor device includes the steps of: forming a first gate structure on a substrate; forming a second gate structure on the substrate and on one side of the first gate structure; forming a third gate structure on the substrate and on another side of the first gate structure; forming source/drain regions adjacent to the second gate structure and the third gate structure; and forming contact plugs to contact the first gate structure, the second gate structure, the third gate structure, and the source/drain regions.
    Type: Grant
    Filed: January 13, 2019
    Date of Patent: January 26, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Sung Huang, Shen-De Wang, Chia-Ching Hsu, Wang Xiang
  • Publication number: 20200373164
    Abstract: A method of fabricating a semiconductor device includes forming a memory gate and a hard mask layer on the memory gate, forming a select gate on a sidewall of the memory gate and the hard mask layer, performing a selective oxidation process to form an oxide layer on the hard mask layer and the select gate, wherein a portion of the oxide layer on the select gate is thicker than a portion of the oxide layer on the hard mask layer, and removing the oxide layer on the hard mask layer and the hard mask layer to expose a top surface of the memory gate.
    Type: Application
    Filed: May 20, 2019
    Publication date: November 26, 2020
    Inventors: WEI XU, WENBO DING, Yu-Yang Chen, Wang Xiang