Abstract: A method includes: inspecting a reticle in a reticle pod, the reticle pod including a sealed space to accommodate the reticle, and the reticle pod further comprising a window arranged on an upper surface of the reticle pod, wherein the inspecting is performed through the window; and moving the reticle out of the reticle pod for performing a lithography operation using the reticle.

Abstract: A device includes a substrate, a first sense amplifier disposed on the substrate, a first word line driver disposed on the substrate and situated adjacent the first sense amplifier in the x-direction, and a first memory array disposed above the first sense amplifier and above the first word line driver in the z-direction. A plurality of first conductive segments extend alternately in the x-direction and the y-direction, and are disposed between the first memory array and the first sense amplifier and configured to electrically connect the first sense amplifier to a first bit line of the first memory array. A plurality of second conductive segments extend alternately in the x-direction and the y-direction, and are disposed between the first memory array and the first word line driver and configured to electrically connect the first word line driver to a first word line of the first memory array.

Abstract: A data communication device is provided that can be connected to a host computer to add communications capabilities to the host. The data communication device contains a user-programmable multi-channel pager/e-mail receiver that has both numeric and alphanumeric capabilities and a modem. Further, the data communication device may be used with the host as a telephone set or a telephone answering machine. When the device is used as a telephone answering machine and a user desires to retrieve stored messages, the local telephone office is prevented from placing a fast busy signal on the telephone line. The user can update the firmware of the data communication device, or it can be updated remotely by downloading a new firmware version using the pager/e-mail receiver.