Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes an electrode plate applied with a power; an ion blocker positioned at a bottom side of the electrode plate, which has a plurality of top holes formed thereon, and which is grounded; a shower head positioned at a bottom side of the ion blocker and which has a plurality of bottom holes formed thereon; and a turbulence generating unit configured to have a turbulence space therein, and which is positioned at a space between the ion blocker and the shower head, and wherein the top hole is positioned to overlap the turbulence space when seen from above, and the bottom hole is positioned at an outer side of the turbulence space, and which faces at least one of a bottom surface of the ion blocker and an outer wall of the turbulence generating unit when seen from below.

Abstract: An absolute steering angle of a steering shaft for a vehicle is measured using rotatable bodies that rotate together with the steering shaft at respective predetermined rotation ratios. A ?M? value is obtained by measuring a relative rotational angle ?? of a first rotatable body and a ?M? value is obtained by measuring the relative rotational angle ?? of a second rotatable body. ?C's are obtained by calculating relative rotational angles ?'s of the second rotatable body corresponding to the ?M? value, using the relation between ?? and ??. A frequency i-value of the first rotatable body is obtained by comparing the ?Cs to the ?M? value. An absolute steering angle ?1 of the steering shaft is obtained based on the relation between absolute rotational angles ? and ?, after ? is obtained using the i-value.

Abstract: A method is provided for measuring an absolute steering angle ? of a steering shaft for a vehicle, using a first rotatable body that rotates together with the steering shaft of the vehicle at a predetermined rotation ratio. The method includes obtaining a ?M? value by measuring a relative rotational angle ?? of the first rotatable body using an angle sensor having a measurement range of ?. The method also includes obtaining a present value for a frequency i-value of the first rotatable body by comparing the present ?M? value to a previous ?M? value. The method also includes obtaining a present value for a absolute steering angle ?1 of the steering shaft from a present value for an absolute rotational angle ? of the first rotatable body by using the ?M? value and the present i-value.

Abstract: A method is provided for measuring an absolute steering angle ? of a steering shaft for a vehicle, using a first rotatable body that rotates together with the steering shaft of the vehicle at a predetermined rotation ratio. The method includes obtaining a ?M? value by measuring a relative rotational angle ?? of the first rotatable body using an angle sensor having a measurement range of ?. The method also includes obtaining a present value for a frequency i-value of the first rotatable body by comparing the present ?M? value to a previous ?M? value. The method also includes obtaining a present value for a absolute steering angle ?1 of the steering shaft from a present value for an absolute rotational angle ? of the first rotatable body by using the ?M? value and the present i-value.

Abstract: A method for measuring a steering angle of a steering shaft for a vehicle uses a first rotatable body that rotates together with the steering shaft at an r1 ratio and a second rotatable body that rotates together with the steering shaft at an r2 ratio. An absolute rotational angle of the first rotatable body, ?, can be expressed as ??+i?, and an absolute rotational angle of the second rotatable body, ?, can be expressed as ??+i?. ?? and ?? are measured using an angle sensor having a measurement range of ?. To obtain the steering angle ? of the steering shaft, measurement values ?M? and for ?M? of ?? and ?? are obtained. A plurality of ?'s corresponding to the ?M? value are calculated from a relation between ?? and ?? to yield a ?C?. By comparing the ?M? to the ?C?, an i-value of the first rotatable body is obtained. The obtained i-value is then used to obtain an absolute rotational angle ? of the first rotatable body.

Abstract: A method is provided for measuring an absolute steering angle of a steering shaft for a vehicle using a first rotatable body and a second rotatable body that rotate together with the steering shaft of the vehicle at a predetermined rotation ratio, respectively. The method includes organizing a table by matching a plurality of relative rotational angle pairs (??, ??), where ?? is a relative rotational angle of the first rotatable body, and ?? is a relative rotational angle of the second rotatable body, with respective absolute steering angles, ?s, that correspond to each of the relative rotational angle pairs. The method also includes obtaining a ?M? value by measuring the relative rotational angle ?? of the first rotatable body and obtaining a ?M? value by measuring the relative rotational angle ?? of the second rotatable body, using at least an angle sensor having a measurement range of ?.