Patents by Inventor Warren W. Lin

Warren W. Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wide band non-coated beam splitter
    Patent number: 5164857
    Abstract: A very wide band beam splitter for operation in the range between deep ultraviolet of 190 nanometers and into infrared is comprised of uncoated transparent material only 0.10 to 0.15 mm. in thickness.
    Type: Grant
    Filed: June 24, 1991
    Date of Patent: November 17, 1992
    Assignee: Nanometrics, Incorporated
    Inventor: Warren W. Lin
  • Thin dielectric film measuring system
    Patent number: 4826321
    Abstract: A system for the precise measurement of thin dielectric films on a substrate by directing a plane polarized laser light beam to the film at the Brewster angle of the substrate and by measuring the intensity changes between a measurement from the substrate alone and from the film coated substrate. Accurate thin film measurements in the range of from about 10 to 1,500 Angstroms are possible.
    Type: Grant
    Filed: March 14, 1988
    Date of Patent: May 2, 1989
    Assignee: Nanometrics, Incorporated
    Inventors: Vincent J. Coates, Warren W. Lin