Abstract: There is provided a burner for decomposing nonflammable materials, which is simple in structure and capable of thermally decomposing even a material which is relatively high in thermal decomposition temperature such as CF4 at as high efficiency as 99% or more. This burner comprises a nonflammable material-containing gas-introducing nozzle (40) which is disposed at one end of a cylindrical body (2) so as to enable the nonflammable material-containing gas to be injected around the center along the direction to the central axis (L) of the cylindrical body (2), and a plurality of oxidizing agent/fuel blow-off nozzles are disposed in a manner that these nozzles are positioned on and along circular lines which are coaxial with the central axis (L) of the cylindrical body (2). These blow-off nozzles (50) are inclined in such a degree as to enable flames (f) ejected therefrom to converge onto approximately the same point on the central axis of the cylindrical body (2).

Abstract: There is provided a burner for decomposing nonflammable materials, which is simple in structure and capable of thermally decomposing even a material which is relatively high in thermal decomposition temperature such as CF4 at as high efficiency as 99% or more. This burner comprises a nonflammable material-containing gas-introducing nozzle (40) which is disposed at one end of a cylindrical body (2) so as to enable the nonflammable material-containing gas to be injected around the center along the direction to the central axis (L) of the cylindrical body (2), and a plurality of oxidizing agent/fuel blow-off nozzles are disposed in a manner that these nozzles are positioned on and along circular lines which are coaxial with the central axis (L) of the cylindrical body (2). These blow-off nozzles (50) are inclined in such a degree as to enable flames (f) ejected therefrom to converge onto approximately the same point on the central axis of the cylindrical body (2).