Abstract: Provided is a MEMS optical scanner that stably performs a scan with light by rotary moving a mirror centering on a V-axis in coincidence with a resonant frequency that enables ramp wave driving while securing shock resistance. The MEMS optical scanner includes a first substrate, a driving portion that drives the mirror by a piezoelectric film in a first axial direction where the piezoelectric film is installed on the first substrate, a frame that supports a driving portion, a second substrate, a support portion that supports the first substrate, a frame portion spaced from and surrounding the support portion, and an axis portion that supports the support portion and the frame portion along a second axial direction. It also includes a rigidity giving portion fixed to the second substrate at both ends thereof along the second axial direction and that drives the support portion in the second axial direction.

Abstract: Provided is a MEMS optical scanner that stably performs a scan with light by rotary moving a mirror centering on a V-axis in coincidence with a resonant frequency that enables ramp wave driving while securing shock resistance. The MEMS optical scanner includes a first substrate, a driving portion that drives the mirror by a piezoelectric film in a first axial direction where the piezoelectric film is installed on the first substrate, a frame that supports a driving portion, a second substrate, a support portion that supports the first substrate, a frame portion spaced from and surrounding the support portion, and an axis portion that supports the support portion and the frame portion along a second axial direction. It also includes a rigidity giving portion fixed to the second substrate at both ends thereof along the second axial direction and that drives the support portion in the second axial direction.

Abstract: The present invention discloses a thin film magnetic head having lower and upper cores, a rear intermediate core interposed between rear portions of the lower and upper cores, a pair of front intermediate cores interposed between front portions of the lower and upper cores and a magnetic gap interposed between the pair of the front intermediate cores, the thin film magnetic head. The rear portions of the lower and upper cores having wider cross-sectional area than those of the front portions of the lower and upper cores which are connected to the rear portions thereof forming an inflection point. In order to prevent the magnetic saturation of the front portions of the lower and upper cores, extended portions are respectively provided on the lower and upper cores by causing distal ends of the front intermediate cores to be extended beyond the inflection point.

Abstract: A thin-film magnetic head for magnetic recording and reproducing apparatus includes a lower insulating layer deposited on a substrate and including a lower magnetic core, an intermediate insulating layer deposited on the lower insulating layer and including front and rear intermediate magnetic cores, and an upper insulating layer deposited on the intermediate insulating layer and including an upper magnetic core. The magnetic cores make up a magnetic circuit which has a magnetic gap defined between the lower magnetic core and the front intermediate magnetic core or between the front intermediate magnetic core and the upper magnetic core. A multiturn coil is embedded in the intermediate insulating layer to surround the rear intermediate magnetic core. The lower, intermediate, and upper insulating layers have respective flat surfaces including respective surfaces of the lower, intermediate, and upper magnetic cores.