Patents by Inventor Wataru Karasawa

Wataru Karasawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4812901
    Abstract: A probe apparatus is disclosed, in which, when performing a predetermined processing on an object having a pattern recurring at a predetermined pitch by moving the object at a pitch equal to the predetermined pitch, the difference between the pitch of actual movement of the object and the pitch of the recurrence of pattern is detected by pattern recognition, and the pitch of movement of the object is corrected according to the detected difference.
    Type: Grant
    Filed: September 23, 1987
    Date of Patent: March 14, 1989
    Assignee: Tokyo Electron Limited
    Inventor: Wataru Karasawa